JPS61221629A - 感圧素子の製造方法 - Google Patents

感圧素子の製造方法

Info

Publication number
JPS61221629A
JPS61221629A JP60052607A JP5260785A JPS61221629A JP S61221629 A JPS61221629 A JP S61221629A JP 60052607 A JP60052607 A JP 60052607A JP 5260785 A JP5260785 A JP 5260785A JP S61221629 A JPS61221629 A JP S61221629A
Authority
JP
Japan
Prior art keywords
pressure
refractive index
optical
optical fiber
optical waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60052607A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554617B2 (https=
Inventor
Takashi Sugihara
孝志 杉原
Masaya Hijikigawa
正也 枅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP60052607A priority Critical patent/JPS61221629A/ja
Priority to US06/839,731 priority patent/US4729240A/en
Priority to DE19863608599 priority patent/DE3608599A1/de
Priority to GB08606483A priority patent/GB2173296B/en
Publication of JPS61221629A publication Critical patent/JPS61221629A/ja
Publication of JPH0554617B2 publication Critical patent/JPH0554617B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP60052607A 1985-03-15 1985-03-15 感圧素子の製造方法 Granted JPS61221629A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP60052607A JPS61221629A (ja) 1985-03-15 1985-03-15 感圧素子の製造方法
US06/839,731 US4729240A (en) 1985-03-15 1986-03-14 Optical pressure sensor
DE19863608599 DE3608599A1 (de) 1985-03-15 1986-03-14 Optischer drucksensor
GB08606483A GB2173296B (en) 1985-03-15 1986-03-17 Optical pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60052607A JPS61221629A (ja) 1985-03-15 1985-03-15 感圧素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61221629A true JPS61221629A (ja) 1986-10-02
JPH0554617B2 JPH0554617B2 (https=) 1993-08-13

Family

ID=12919477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60052607A Granted JPS61221629A (ja) 1985-03-15 1985-03-15 感圧素子の製造方法

Country Status (4)

Country Link
US (1) US4729240A (https=)
JP (1) JPS61221629A (https=)
DE (1) DE3608599A1 (https=)
GB (1) GB2173296B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285794A (ja) * 2006-04-14 2007-11-01 Yokogawa Denshikiki Co Ltd 外力検出装置
JP2022063200A (ja) * 2020-10-09 2022-04-21 住友ベークライト株式会社 センサー用光部品
JP2023012824A (ja) * 2021-07-14 2023-01-26 住友ベークライト株式会社 センサー用光部品およびセンシングシステム

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD292599A7 (de) * 1986-10-23 1991-08-08 Leistungselektronik Stahnsdorf Sensitive verbundfolie und verfahren zu ihrer herstellung
US4918305A (en) * 1988-08-01 1990-04-17 General Motors Corporation Fiber optic pressure sensor using pressure sensitive fiber different from input and output fibers
GB2223841A (en) * 1988-08-31 1990-04-18 Red Kite Tech Parameter measurement using refractive index change
GB2225850B (en) * 1988-12-09 1992-12-23 Emi Plc Thorn Pressure sensing device
US5671191A (en) * 1989-07-06 1997-09-23 Sperry Marine Inc. Variable coupler fiber optic sensor hydrophone
TW331588B (en) * 1997-05-21 1998-05-11 Ind Tech Res Inst Optical vacuum gauge system
EP1254357B1 (en) 2000-02-11 2006-12-06 Rosemount Inc. Optical pressure sensor
US11867855B2 (en) * 2019-12-10 2024-01-09 Baker Hughes Oilfield Operations Llc Downhole fiber optic hydrophone
CN113624372B (zh) * 2021-08-12 2023-04-21 云南师范大学 一种基于光纤的压力探测装置
CN113720505B (zh) * 2021-09-01 2023-09-19 云南师范大学 一种基于弹光效应的压力探测装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160053A (https=) * 1974-06-17 1975-12-25
JPS57166294U (https=) * 1981-04-09 1982-10-20
JPS5834415A (ja) * 1981-08-24 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 光導波路と光フアイバの結合方法
JPS59154333A (ja) * 1983-02-23 1984-09-03 Hitachi Cable Ltd 光フアイバ形圧力センサ

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1584173A (en) * 1977-07-27 1981-02-11 Battelle Development Corp Apparatus for measuring strain in a solid object
US4235113A (en) * 1978-08-21 1980-11-25 Carome Edward F Optical fiber acoustical sensors
US4295738A (en) * 1979-08-30 1981-10-20 United Technologies Corporation Fiber optic strain sensor
SE420130B (sv) * 1980-01-24 1981-09-14 Asea Ab Optiskt metdon for metning av kraft eller tryck
FR2480433A1 (fr) * 1980-04-11 1981-10-16 Fort Francois Capteur par detection de pression
US4375680A (en) * 1981-01-16 1983-03-01 Mcdonnell Douglas Corporation Optical acoustic sensor
GB2125179B (en) * 1982-08-03 1986-08-06 Standard Telephones Cables Ltd Distributed sensors
US4495819A (en) * 1982-12-23 1985-01-29 Gould Inc. Optical pressure sensor
DE3307964A1 (de) * 1983-03-07 1984-09-13 Philips Patentverwaltung Gmbh, 2000 Hamburg Drucksensor
US4634858A (en) * 1984-10-17 1987-01-06 Sperry Corporation Variable coupler fiberoptic sensor
US4688883A (en) * 1985-05-20 1987-08-25 Canadian Marconi Company Integrated optics stress transducer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50160053A (https=) * 1974-06-17 1975-12-25
JPS57166294U (https=) * 1981-04-09 1982-10-20
JPS5834415A (ja) * 1981-08-24 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 光導波路と光フアイバの結合方法
JPS59154333A (ja) * 1983-02-23 1984-09-03 Hitachi Cable Ltd 光フアイバ形圧力センサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007285794A (ja) * 2006-04-14 2007-11-01 Yokogawa Denshikiki Co Ltd 外力検出装置
JP2022063200A (ja) * 2020-10-09 2022-04-21 住友ベークライト株式会社 センサー用光部品
JP2023012824A (ja) * 2021-07-14 2023-01-26 住友ベークライト株式会社 センサー用光部品およびセンシングシステム

Also Published As

Publication number Publication date
GB2173296A (en) 1986-10-08
US4729240A (en) 1988-03-08
GB8606483D0 (en) 1986-04-23
DE3608599C2 (https=) 1988-04-14
GB2173296B (en) 1988-10-05
JPH0554617B2 (https=) 1993-08-13
DE3608599A1 (de) 1986-09-18

Similar Documents

Publication Publication Date Title
EP1182445B1 (en) Integrated optic interferometric sensor
JPS61221629A (ja) 感圧素子の製造方法
JPH05142423A (ja) 光学装置及び偏光装置
JPS6351243B2 (https=)
CN102721431A (zh) 锥型波导辅助的级联长周期波导光栅传感器及其制备方法
CN108844919A (zh) 包层反射式倾斜光纤光栅折射率传感器及制作、测量方法
US12276837B2 (en) Double-parameter in-situ sensor based on waveguide grating, a sensing system and a preparation method
CN111121838A (zh) 一种倾斜光栅分束的双芯光纤Michelson干涉仪
JP2003156643A (ja) 光学素子及びそれを用いた計測装置
CN105241842A (zh) 一种基于单模-多模-单模光纤锥头(smst)的小型光纤折射率传感器
US5448058A (en) Optical signal detection apparatus and method for preventing polarization signal fading in optical fiber interferometric sensor systems
CN102141413A (zh) 一种全光纤条件下实现外差测量的方法
CN116989847A (zh) 基于混合腔的温度压力传感器及其制备方法和温压测法
JP2004198116A (ja) ブラッググレーティング方式の光導波路型センサおよびその製造方法
CN117928629A (zh) 一种双参数传感器及双参数传感系统
CN115900654A (zh) 一种基于f-p腔干涉的倾角测量系统
CN209310962U (zh) 一种保偏光纤压力传感器
CN116046034A (zh) 一种同时测量扭转、温度和应变的反射式光纤传感器
JPH0690338B2 (ja) フアイバ形センサ
CN110631684A (zh) 传感探头、抑制偏振衰落的光纤干涉装置及方法
CN221037322U (zh) 一种光纤倾角传感器
Homola et al. Advances in development of miniature fiber optic surface plasmon resonance sensors
Duarte et al. Optical Fiber Sensing Principles
CN118362197A (zh) 一种基于纤内马赫-曾德尔干涉仪的非本征光纤迈克尔逊声压传感器
JPH0319937B2 (https=)