JPS61219817A - デイスク形状測定装置 - Google Patents

デイスク形状測定装置

Info

Publication number
JPS61219817A
JPS61219817A JP6228085A JP6228085A JPS61219817A JP S61219817 A JPS61219817 A JP S61219817A JP 6228085 A JP6228085 A JP 6228085A JP 6228085 A JP6228085 A JP 6228085A JP S61219817 A JPS61219817 A JP S61219817A
Authority
JP
Japan
Prior art keywords
disk
disc
converter
angle
displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6228085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327841B2 (enrdf_load_stackoverflow
Inventor
Kenta Mikuriya
健太 御厨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP6228085A priority Critical patent/JPS61219817A/ja
Publication of JPS61219817A publication Critical patent/JPS61219817A/ja
Publication of JPH0327841B2 publication Critical patent/JPH0327841B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP6228085A 1985-03-27 1985-03-27 デイスク形状測定装置 Granted JPS61219817A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6228085A JPS61219817A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6228085A JPS61219817A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Publications (2)

Publication Number Publication Date
JPS61219817A true JPS61219817A (ja) 1986-09-30
JPH0327841B2 JPH0327841B2 (enrdf_load_stackoverflow) 1991-04-17

Family

ID=13195566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6228085A Granted JPS61219817A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Country Status (1)

Country Link
JP (1) JPS61219817A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08227523A (ja) * 1995-02-22 1996-09-03 Nec Corp ランアウト測定装置
JP2006322868A (ja) * 2005-05-20 2006-11-30 Olympus Corp ３次元形状測定方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08227523A (ja) * 1995-02-22 1996-09-03 Nec Corp ランアウト測定装置
JP2006322868A (ja) * 2005-05-20 2006-11-30 Olympus Corp ３次元形状測定方法

Also Published As

Publication number Publication date
JPH0327841B2 (enrdf_load_stackoverflow) 1991-04-17

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