JPS61219816A - デイスク形状測定装置 - Google Patents

デイスク形状測定装置

Info

Publication number
JPS61219816A
JPS61219816A JP6227985A JP6227985A JPS61219816A JP S61219816 A JPS61219816 A JP S61219816A JP 6227985 A JP6227985 A JP 6227985A JP 6227985 A JP6227985 A JP 6227985A JP S61219816 A JPS61219816 A JP S61219816A
Authority
JP
Japan
Prior art keywords
disk
disc
error
signal
mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6227985A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352890B2 (enrdf_load_stackoverflow
Inventor
Kenta Mikuriya
健太 御厨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP6227985A priority Critical patent/JPS61219816A/ja
Publication of JPS61219816A publication Critical patent/JPS61219816A/ja
Publication of JPH0352890B2 publication Critical patent/JPH0352890B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Optical Record Carriers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP6227985A 1985-03-27 1985-03-27 デイスク形状測定装置 Granted JPS61219816A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6227985A JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6227985A JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Publications (2)

Publication Number Publication Date
JPS61219816A true JPS61219816A (ja) 1986-09-30
JPH0352890B2 JPH0352890B2 (enrdf_load_stackoverflow) 1991-08-13

Family

ID=13195540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6227985A Granted JPS61219816A (ja) 1985-03-27 1985-03-27 デイスク形状測定装置

Country Status (1)

Country Link
JP (1) JPS61219816A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004042719A1 (en) 2002-11-06 2004-05-21 Koninklijke Philips Electronics N.V. Apparatus and method for determining angular position of a rotating disk
JP2012018717A (ja) * 2010-07-07 2012-01-26 Pulstec Industrial Co Ltd スタンパー偏心量測定方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5171161A (enrdf_load_stackoverflow) * 1974-12-18 1976-06-19 Hitachi Ltd
JPS5288054A (en) * 1976-01-16 1977-07-22 Osaka Kiko Co Ltd Method of and apparatus for accurately measuring inner and outer diameter of work
JPS5853843A (ja) * 1981-09-25 1983-03-30 Toshiba Corp 半導体装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5171161A (enrdf_load_stackoverflow) * 1974-12-18 1976-06-19 Hitachi Ltd
JPS5288054A (en) * 1976-01-16 1977-07-22 Osaka Kiko Co Ltd Method of and apparatus for accurately measuring inner and outer diameter of work
JPS5853843A (ja) * 1981-09-25 1983-03-30 Toshiba Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004042719A1 (en) 2002-11-06 2004-05-21 Koninklijke Philips Electronics N.V. Apparatus and method for determining angular position of a rotating disk
JP2012018717A (ja) * 2010-07-07 2012-01-26 Pulstec Industrial Co Ltd スタンパー偏心量測定方法

Also Published As

Publication number Publication date
JPH0352890B2 (enrdf_load_stackoverflow) 1991-08-13

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