JPS61214341A - 荷電ビームの集束方法 - Google Patents

荷電ビームの集束方法

Info

Publication number
JPS61214341A
JPS61214341A JP60055051A JP5505185A JPS61214341A JP S61214341 A JPS61214341 A JP S61214341A JP 60055051 A JP60055051 A JP 60055051A JP 5505185 A JP5505185 A JP 5505185A JP S61214341 A JPS61214341 A JP S61214341A
Authority
JP
Japan
Prior art keywords
charged beam
charged
hole
shape
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60055051A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0361980B2 (enExample
Inventor
Shingo Ichimura
信吾 一村
Hajime Shimizu
肇 清水
Hiroshi Murakami
寛 村上
Masatoshi Ono
雅敏 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60055051A priority Critical patent/JPS61214341A/ja
Publication of JPS61214341A publication Critical patent/JPS61214341A/ja
Publication of JPH0361980B2 publication Critical patent/JPH0361980B2/ja
Granted legal-status Critical Current

Links

JP60055051A 1985-03-19 1985-03-19 荷電ビームの集束方法 Granted JPS61214341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60055051A JPS61214341A (ja) 1985-03-19 1985-03-19 荷電ビームの集束方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60055051A JPS61214341A (ja) 1985-03-19 1985-03-19 荷電ビームの集束方法

Publications (2)

Publication Number Publication Date
JPS61214341A true JPS61214341A (ja) 1986-09-24
JPH0361980B2 JPH0361980B2 (enExample) 1991-09-24

Family

ID=12987873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60055051A Granted JPS61214341A (ja) 1985-03-19 1985-03-19 荷電ビームの集束方法

Country Status (1)

Country Link
JP (1) JPS61214341A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03190044A (ja) * 1989-12-19 1991-08-20 Ebara Corp 電子線加速器
JP2007003418A (ja) * 2005-06-24 2007-01-11 Institute Of Physical & Chemical Research 荷電粒子ビームの偏向・収束方法および荷電粒子ビームの偏向・収束器具

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03190044A (ja) * 1989-12-19 1991-08-20 Ebara Corp 電子線加速器
JP2007003418A (ja) * 2005-06-24 2007-01-11 Institute Of Physical & Chemical Research 荷電粒子ビームの偏向・収束方法および荷電粒子ビームの偏向・収束器具

Also Published As

Publication number Publication date
JPH0361980B2 (enExample) 1991-09-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term