JPS61213608A - 光電式測定機器 - Google Patents
光電式測定機器Info
- Publication number
- JPS61213608A JPS61213608A JP5479885A JP5479885A JPS61213608A JP S61213608 A JPS61213608 A JP S61213608A JP 5479885 A JP5479885 A JP 5479885A JP 5479885 A JP5479885 A JP 5479885A JP S61213608 A JPS61213608 A JP S61213608A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- output
- value
- display means
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003708 edge detection Methods 0.000 claims abstract description 52
- 230000010363 phase shift Effects 0.000 claims abstract description 15
- 238000013459 approach Methods 0.000 claims description 16
- 238000001514 detection method Methods 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 8
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000004364 calculation method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000005070 sampling Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 244000145845 chattering Species 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/028—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring lateral position of a boundary of the object
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5479885A JPS61213608A (ja) | 1985-03-19 | 1985-03-19 | 光電式測定機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5479885A JPS61213608A (ja) | 1985-03-19 | 1985-03-19 | 光電式測定機器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61213608A true JPS61213608A (ja) | 1986-09-22 |
| JPH0321841B2 JPH0321841B2 (enrdf_load_stackoverflow) | 1991-03-25 |
Family
ID=12980772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5479885A Granted JPS61213608A (ja) | 1985-03-19 | 1985-03-19 | 光電式測定機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61213608A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0436609A (ja) * | 1990-05-31 | 1992-02-06 | Mitsutoyo Corp | 変位検出装置 |
-
1985
- 1985-03-19 JP JP5479885A patent/JPS61213608A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0436609A (ja) * | 1990-05-31 | 1992-02-06 | Mitsutoyo Corp | 変位検出装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321841B2 (enrdf_load_stackoverflow) | 1991-03-25 |
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