JPS6120919A - 投影レンズ - Google Patents

投影レンズ

Info

Publication number
JPS6120919A
JPS6120919A JP14205984A JP14205984A JPS6120919A JP S6120919 A JPS6120919 A JP S6120919A JP 14205984 A JP14205984 A JP 14205984A JP 14205984 A JP14205984 A JP 14205984A JP S6120919 A JPS6120919 A JP S6120919A
Authority
JP
Japan
Prior art keywords
lens
refractive power
lens group
meniscus
convex surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14205984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473844B2 (enExample
Inventor
Takamasa Hirose
広瀬　隆昌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP14205984A priority Critical patent/JPS6120919A/ja
Priority to GB08432300A priority patent/GB2153543B/en
Priority to DE3447489A priority patent/DE3447489C2/de
Publication of JPS6120919A publication Critical patent/JPS6120919A/ja
Priority to US07/212,081 priority patent/US4891663A/en
Priority to US07/212,148 priority patent/US4977426A/en
Publication of JPH0473844B2 publication Critical patent/JPH0473844B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Lenses (AREA)
JP14205984A 1983-12-28 1984-07-09 投影レンズ Granted JPS6120919A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP14205984A JPS6120919A (ja) 1984-07-09 1984-07-09 投影レンズ
GB08432300A GB2153543B (en) 1983-12-28 1984-12-20 A projection exposure apparatus
DE3447489A DE3447489C2 (de) 1983-12-28 1984-12-27 Verfahren und Vorrichtung zur Projektionsbelichtung
US07/212,081 US4891663A (en) 1983-12-28 1988-06-24 Projection exposure apparatus
US07/212,148 US4977426A (en) 1983-12-28 1988-06-24 Projection exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14205984A JPS6120919A (ja) 1984-07-09 1984-07-09 投影レンズ

Publications (2)

Publication Number Publication Date
JPS6120919A true JPS6120919A (ja) 1986-01-29
JPH0473844B2 JPH0473844B2 (enExample) 1992-11-24

Family

ID=15306459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14205984A Granted JPS6120919A (ja) 1983-12-28 1984-07-09 投影レンズ

Country Status (1)

Country Link
JP (1) JPS6120919A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007222784A (ja) * 2006-02-23 2007-09-06 Mitsubishi Heavy Ind Ltd ロータリーアトマイザ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007222784A (ja) * 2006-02-23 2007-09-06 Mitsubishi Heavy Ind Ltd ロータリーアトマイザ

Also Published As

Publication number Publication date
JPH0473844B2 (enExample) 1992-11-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term