JPS61206918A - Magnetic storage body and its production - Google Patents

Abstract

PURPOSE:To improve wear resistance and corrosion preventiveness by coating an insulating silicon carbide film contg. hydrogen on a magnetic medium. CONSTITUTION:The magnetic medium 2 is coated on a substrate 1. The insulating silicon carbide 3 contg. hydrogen is further coated as a protective film on the medium 2. The insulating silicon carbide film contg. hydrogen to be used is incorporated therein with 5-30atom% hydrogen and is different from the silicon carbide which is formed by a sputtering method and does not contain hydrogen. Said film is an insulator having amorphous structure and >=50OMEGAcm electrical resistivity and the Vickers hardness thereof is >=1,000.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic storage body used in a magnetic storage device (such as a magnetic disk device or a magnetic drum device) and a method for manufacturing the same.

(Prior Art and its Problems) In general, there are the following methods for recording and reproducing a magnetic storage device that includes a recording and reproducing magnetic head (hereinafter referred to as a head) and a magnetic storage body. In other words, at the start of operation, the head and the magnetic storage surface are set in contact, and then the required rotation is applied to the magnetic storage to create a gap between the head and the magnetic storage surface, and in this state. This is a recording/reproducing method (referred to as the contact start/stop method, hereinafter referred to as the C8S method). In this method, the magnetic storage body stops rotating at the end of the operation, and at this time the head and the magnetic storage body surface are brought into a contact frictional state similar to that at the start of the operation.

The frictional force generated between the head and the magnetic storage body in these contact friction states causes the head and the magnetic storage body to wear out.
Eventually, the head and magnetic medium may be damaged. Further, in a state of contact friction, a slight change in the posture of the head causes the load applied to the head to become uneven, which may cause scratches on the head and the surface of the magnetic storage body. Also,
When the magnetic medium is metal, corrosion occurs due to moisture intrusion at high humidity. Various protective films have been studied to prevent these wear and corrosion. Conventional magnetic memory bodies are coated with a protective film such as a silicon carbide film by sputtering, but these have the drawback of not having sufficient wear resistance and corrosion resistance.

(Objective of the Invention) An object of the present invention is to provide a magnetic memory having excellent wear resistance and corrosion resistance, and a method for manufacturing the same.

(Structure of the Invention) The magnetic storage body of the present invention includes a base body, a magnetic medium coated on the base body, and an insulating silicon carbide film coated on the magnetic medium and containing at least hydrogen. It consists of

The method for manufacturing a magnetic memory of the present invention includes coating a silicon carbide film on a magnetic medium coated on a base body by plasma chemical vapor deposition in an atmosphere containing at least tetramethylsilane and hydrogen gas. Features.

(Example) Next, the present invention will be described in detail with reference to the drawings.

FIG. 1 is a partial sectional view of one embodiment of the magnetic memory body of the present invention, in which the base body 1 is made of aluminum alloy (or anodized aluminium), N
iP plating film, aluminum alloy or polyester coated with Cr, Mo or W, polyimide, polyamideimide,
Glass plates such as polyether sulfon, ceramics such as silicon nitride, aluminum oxide, sintered bodies of aluminum oxide and titanium carbide, metals such as Si, Cr, Mo, W, stainless steel, and titanium alloys, or glass plates.

Next, Fe504+α- is placed on the base body 1 as the magnetic medium 2.
Fe,. 3. Coating iron oxides or nitrides such as Fe, N, or metals or alloys such as Co-Ni-Mo or Co-8m.

Further, on top of the magnetic medium 2, an insulating silicon carbide film 3 containing at least hydrogen as an a-retaining film is coated by plasma CVD in an atmosphere containing at least tetramethylsilane and hydrogen gas.

The hydrogen-containing insulating silicon carbide film used in the present invention is different from hydrogen-free silicon carbide that contains 5 to 30 atomic percent hydrogen and is prepared by the cis battering method. Structure is amorphous, electrical resistivity is 50Ω
cm or more, and has a Vickers hardness of 1000 or more. Hydrogen-free silicon carbide films created by sputtering have a Vickers hardness of 600 or less, have a weak structure, and are removed from the disk surface by head sliding, making it difficult to provide magnetic storage with sufficient wear resistance. As soon as possible. Furthermore, silicon carbide films that do not contain hydrogen and are produced by sputtering have poor anticorrosive effects in preventing moisture from entering under high humidity conditions.

However, the hydrogen-containing insulating silicon carbide film of the present invention has high hardness, density that prevents moisture from entering, and water repellency, and has sufficient wear resistance and corrosion resistance.

Next, the present invention will be explained in detail with reference to Examples.

Example 1 The base body 1 shown in FIG. 1 is an aluminum alloy coated with a nickel-phosphorus plating film and mirror-finished to a surface roughness of Q, QQ5P. A cobalt-nickel-phosphorus alloy with a thickness of 0.05μ is used as the magnetic medium 2 shown in FIG.
Plated to a thickness of m. Next, a first
The hydrogen-containing insulating silicon carbide film 3 of the protective film shown in the figure was formed by plasma CVD in hydrogen gas containing tetramethylsilane under the following conditions. D A magnetic disk was produced by coating to a thickness of 0.05 μm. The conditions were as follows: hydrogen gas was passed through tetramethylsilane at 0° C., the flow rate was 20 SCCM, the gas pressure was 1 torr, and the high frequency power was 30 W), and the amount of hydrogen contained in the film was 20 atomic percent.

Example 2 In the same manner as in Example 1, however, a cobalt-chromium alloy was deposited to a thickness of 0.5 μm by sputtering as the magnetic medium 2.
A magnetic disk was made by coating the material to a thickness of .

Comparative Example A magnetic disk was fabricated in the same manner as in Example 1, except that silicon carbide was coated on magnetic medium 2 by sputtering under the following conditions. The creation conditions are 4x argon gas pressure.
IQ-2torr, sputtering power density 8νV/c
m2.

Next, using the magnetic disks shown in Examples 1 and 2 and the comparative example, a start/stop edge reversal test (CS) of the head and disk was performed.
When a corrosion resistance test was conducted for one month at a temperature of 90°C and a relative humidity of 90%, no scratches occurred over 20,000 times in the C8S test for both Examples 1 and 2, and in the corrosion resistance test, Engineering 2 - The rate of increase remained unchanged. on the other hand,
Regarding the comparative example, in the C8S test, scratches occurred after 3000 times, and in the corrosion resistance test, the error increase rate increased tenfold.

(Effects of the Invention) As explained above, the magnetic memory of the present invention has the advantage of excellent wear resistance and corrosion resistance.

Although a magnetic disk has been described as an embodiment of the present invention, it is clear that the present invention is also effective for floppy disks, magnetic tapes, and magnetic cards.

[Brief explanation of drawings]

FIG. 1 is a partial cross-sectional view of one embodiment of the magnetic storage body of the present invention. 1... Base body, 2... Magnetic medium, 3.
...Silicon carbide film containing hydrogen.

Claims (2)

[Claims] (1) A magnetic memory body comprising a base body, a magnetic medium coated on the base body, and an insulating silicon carbide film coated on the magnetic medium and containing at least hydrogen. (2) Manufacturing a magnetic memory body characterized by coating a magnetic medium coated on a base body with a silicon carbide film by plasma chemical vapor deposition in an atmosphere containing at least tetramethylsilane and hydrogen gas. Method.