JPS60209929A - Magnetic storage body and its production - Google Patents

Abstract

PURPOSE:To obtain a magnetic storage body having excellent wear resistance and corrosion preventiveness by forming an insulating carbon film contg. fluorine on a medium and having a three-dimensional structure on a magnetic medium coated on a substrate. CONSTITUTION:A substrate 1 consists of an aluminum alloy or anodized alumite, NiP-plated film, aluminum alloy coated with Cr, Mo or W, etc., ceramics such as polyester or metals such as Si, Cr, Mo, W, stainless steel and titanium alloy or glass plate. A metal or alloy of iron oxide or nitride, etc. such as Fe3O4, gamma-Fe2O3, Fe4N or the like is coated as a magnetic medium 2 on the substrate 1. An insulating carbon film 3 contg. fluorine is further coated on the medium 2 by sputtering carbon in an atmosphere contg. gaseous fluorocarbon.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magnetic storage body used in a magnetic storage device (such as a magnetic disk device or a magnetic drum device) and a method for manufacturing the same.

(Prior Art and its Problems) In general, there are the following methods for recording and reproducing a magnetic storage device that includes a recording and reproducing magnetic head (hereinafter referred to as a head) and a magnetic storage body. In other words, after setting the head and the magnetic storage surface in contact at the start of operation, the required rotation is given to the magnetic storage to create a space equivalent to an air layer between the head and the magnetic storage surface, and recording is performed in this state. This is a method of playback (contact start-stop method).

(call out LJTC8S force)-t'θ) In the molten state, the rotation of the magnetic storage body stops at the time of out-of-field recognition, and at this time, the head and the magnetic storage body surface are in a contact friction state as at the start of operation.

The frictional force generated between the head and the magnetic storage body under these contact friction conditions may wear out the head and the magnetic storage body, and may eventually cause scratches on the head and the magnetic medium. Further, in the contact friction state, a slight change in the posture of the head causes the load applied to the head to become uneven, which may cause scratches on the head and the surface of the magnetic storage body. Furthermore, if the magnetic medium is metal, corrosion occurs due to moisture intrusion at high humidity. In order to prevent these wear and corrosion, various protective films have been studied, and
Graphite films made by sputtering as shown in No. 57002, and carbon films made by vapor deposition using spark discharge from carbon rods as shown in Japanese Patent Publication No. 54-33521 are known, but both of them have sufficient wear resistance and anticorrosion properties. I don't have it.

(Object of the Invention) An object of the present invention is to provide a magnetic memory having excellent wear resistance and corrosion resistance.

(Structure of the Invention) That is, the present invention has a magnetic medium coated on a base body,
A magnetic storage body in which an insulating carbon film containing fluorine and having a three-dimensional structure is formed on the medium, and a magnetic medium is formed on a base body, and then a fluorinated carbon gas is formed on the magnetic medium. By sputtering carbon in an atmosphere,
This is a method for manufacturing a magnetic memory body characterized by coating it with an insulating carbon film containing fluorine.

(Detailed explanation of configuration) Next, the present invention will be described in detail with reference to the drawings.

The figure is a partial cross-sectional view of the magnetic storage body of the present invention, in which the base body 1 is made of aluminum alloy or anodized alumite, NiP plating film, O
Aluminum alloy coated with R, Mo or W, or plastics such as polyester, polyimide, polyamideimide, polyethersulfone, or silicon nitride, silicon carbide, aluminum oxide.

They are ceramics such as aluminum oxide and titanium carbide sintered bodies, metals such as 8i, Cr, Mo, W, stainless steel, titanium alloys, or glass plates.

Next, a magnetic medium 2 with re, 0.
, γ-Fe, O, , re, N, or other iron oxides or nitrides, or Co-Ni, Co-Ni-P, C
o-几e.

Co-Ni-Mn-e-P, Co-Cr,
Co-V.

Co-Pt, Co-Ni-Pt, Co-Pt
-Cr.

Co-Pt-V, Co-Rh, Co-Ni-
Coating with metal or alloy such as Mo or Co-8m.

Furthermore, an insulating carbon film 3 containing fluorine is provided on the magnetic medium 2.
is coated by sputtering carbon in an atmosphere containing fluorinated carbon gas. The fluorine-containing insulating carbon film used in the present invention contains 50 atomic percent or less of fluorine, but is different from fluorinated carbon having a so-called layered structure. Its structure is similar to diamond, and it is an insulating material with an electrical resistivity of 10-20.2 or more, which is different from conductive 1-like graphite (graphite) and amorphous carbon, which have an electrical resistivity of 10-20.σ or less. . Battered carbon or graphite, which has a layered structure, and amorphous carbon have a weak structure - they are removed from the disk surface by the sliding of the head, and cannot provide sufficient wear resistance to the magnetic memory. Further, although the carbon film having a diamond-like structure has high hardness, it has a large coefficient of friction and is easily scratched by the sliding of the head, so that it cannot provide sufficient wear resistance.

Furthermore, a carbon film with a diamond-like structure has a poor anticorrosive effect in preventing moisture from entering under high humidity conditions.

In addition, the layered fluorinated carbon film also has large gaps between crystals,
Sufficient anti-corrosion effect cannot be obtained.

However, the fluorine-containing insulating carbon film of the present invention has high hardness, a low coefficient of friction, a density that prevents moisture from entering, and water repellency, and has sufficient wear resistance and corrosion resistance.

Further, the fluorine-containing insulating carbon film of the present invention can be coated by sputtering, ion plating, or vapor deposition of carbon in a fluorinated carbon gas. The fluorinated carbon gas used here is a substance with a high vapor pressure and the following structure.

That is, CnFzn-t+2X1 (n is an integer less than or equal to IO, l is an integer from O to 2n+1, X is H, C7l,
, Br or ■), or CnFzn-tnXm
(n is an integer of 10 or less, m is an integer of 0 to 2 n-1,
is H, (J, Br or ■).

Next, the present invention will be explained in detail with reference to Examples.

(Example 1) A cobalt-nickel-phosphorus alloy was coated as a magnetic medium 2 on a base body 1 in which an aluminum alloy was coated with a nickel-phosphorus plating film and mirror-finished to a surface roughness of 0.005 μm.
It was plated to a thickness of 0.05 μm. Next, a protective film 3 is formed on the magnetic medium 2 using carbon as a fluorinated carbon gas.
A magnetic disk was produced by sputtering in a gas under the following conditions to coat an insulating carbon film containing fluorine to a thickness of 0.05 μm. Conditions are gas pressure ratio (PAr/PN2) ~16
．． The sputtering gas pressure was 1X10-2 torr, the sputtering power density was 8 W/cm2, and the amount of fluorine contained in the film was 10 atomic percent.

(Example 2) A magnetic disk was produced in the same manner as in Example 1, except that the magnetic medium 2 was coated with a cobalt-chromium alloy to a thickness of 0.5 μm by sputtering.

(Example 3) Same as Example 1 except that C, C, and fluorinated carbon gas were used.
A magnetic disk was made using F8 gas.

(Example 4) A magnetic disk was produced by sputtering in the same manner as in Example 2 but under the following conditions to coat an insulating carbon film containing fluorine to a thickness of 0.02 μm. The experimental conditions were as follows: gas pressure ratio (PAr/PN2)' * sputtering gas pressure 4×10 torr, sputtering power density: 10 torr, and fluorine content in the film: 1 atomic percent.

(Example 5) A magnetic disk was manufactured in the same manner as in Example 1, except that CF, =: CF, gas was used as the fluorinated carbon gas under the following conditions. The experimental conditions were gas pressure ratio (PA, /Ps, )
~30. Sputtering gas pressure 8×10”torr,
Sputtering power density: 5 W/crIL2, and fluorine content in the film: 40 atomic percent.

(Comparative Example 1) A magnetic disk was manufactured in the same manner as in Example 1, except that carbon was coated on the magnetic medium 2 by sputtering under the following conditions. Experimental conditions were gas pressure PAr: 4X10-2t
orr, sputtering power density: 8W/Cl71''.

(Comparative Example 2) A magnetic disk was produced in the same manner as Comparative Example 1, except that layered fluorinated carbon was applied onto the magnetic medium 2 by sputtering.

Next, using the magnetic disks shown in Examples 1 to 5 and Comparative Example 1.2, the friction coefficient was measured, the head and disk were started and stopped repeatedly tested (CSS test), and the temperature
A corrosion resistance test was conducted for one month at 90% relative humidity and the results shown in the table below were obtained.

(Effects of the Invention) As is clear from the above results, it was found that the magnetic memory of the present invention has excellent wear resistance and corrosion resistance.

In the embodiments of the present invention, magnetic disks have been described, but floppy disks and magnetic tapes may also be used.

It is clear that the present invention is also effective for magnetic cards.

[Brief explanation of the drawing]

The figure is a partial sectional view of the magnetic storage body of the present invention. 1 is a base body, 2 is a magnetic medium, and 3 is an insulating carbon film containing fluorine.

Claims (1)

[Claims] +1) A magnetic memory characterized in that a magnetic medium is coated on a base body, and an insulating carbon film containing fluorine and having a three-dimensional structure is further coated on the medium. body. (2) The magnetic memory body according to claim 1, wherein the insulating carbon film contains 50 atomic percent or less of fluorine. (3) A method for manufacturing a magnetic memory body, which comprises coating a magnetic medium on a base body and sputtering carbon thereon in an atmosphere containing fluorinated carbon gas. (4) Fluorinated carbon gas is CnFzn-t+zXt
(n is an integer of 10 or less, ! is an integer of 0 to 2n+1, x height, cl. Br or engineering) as described in claim 3 (5)
Fluorinated carbon gas is CnFzn-mXm (n is an integer of 10 or less, 1m is an integer of θ to 2n-1, X is H, C1°B
The magnetic storage body according to claim 3, which is r or I).