JPS61204545A - 水素検知光センサ− - Google Patents
水素検知光センサ−Info
- Publication number
- JPS61204545A JPS61204545A JP60044647A JP4464785A JPS61204545A JP S61204545 A JPS61204545 A JP S61204545A JP 60044647 A JP60044647 A JP 60044647A JP 4464785 A JP4464785 A JP 4464785A JP S61204545 A JPS61204545 A JP S61204545A
- Authority
- JP
- Japan
- Prior art keywords
- light
- hydrogen
- substrate
- light absorption
- absorbing layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 239000001257 hydrogen Substances 0.000 title claims abstract description 25
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 25
- 230000031700 light absorption Effects 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 238000006243 chemical reaction Methods 0.000 claims abstract description 7
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000001179 sorption measurement Methods 0.000 claims description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical group [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 3
- 229910052765 Lutetium Inorganic materials 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- 125000004802 cyanophenyl group Chemical group 0.000 claims description 2
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims description 2
- 239000011368 organic material Substances 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 239000002510 pyrogen Substances 0.000 claims description 2
- 239000000835 fiber Substances 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 3
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 150000002431 hydrogen Chemical class 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 14
- 239000010408 film Substances 0.000 description 6
- 230000009471 action Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005342 ion exchange Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007670 refining Methods 0.000 description 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- 101100264174 Mus musculus Xiap gene Proteins 0.000 description 1
- 229910019603 Rh2O3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000003209 petroleum derivative Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- -1 thallium ions Chemical class 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- ZNOKGRXACCSDPY-UHFFFAOYSA-N tungsten trioxide Chemical compound O=[W](=O)=O ZNOKGRXACCSDPY-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910009112 xH2O Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60044647A JPS61204545A (ja) | 1985-03-08 | 1985-03-08 | 水素検知光センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60044647A JPS61204545A (ja) | 1985-03-08 | 1985-03-08 | 水素検知光センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61204545A true JPS61204545A (ja) | 1986-09-10 |
| JPH0223826B2 JPH0223826B2 (enrdf_load_stackoverflow) | 1990-05-25 |
Family
ID=12697231
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60044647A Granted JPS61204545A (ja) | 1985-03-08 | 1985-03-08 | 水素検知光センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61204545A (enrdf_load_stackoverflow) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307335A (ja) * | 1987-05-22 | 1988-12-15 | アメリカン テレフォン アンド テレグラフ カムパニー | 広域センサ、広域検出方法及びその装置 |
| US5733506A (en) * | 1989-11-08 | 1998-03-31 | British Technology Group, Ltd. | Gas sensors and compounds suitable therefor |
| GB2408796A (en) * | 2003-12-01 | 2005-06-08 | Stephen Richard Elliott | Raman gain or loss effect optical sensor chip |
| JP2007071866A (ja) * | 2005-08-10 | 2007-03-22 | Tokyo Univ Of Science | ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法 |
| KR100842119B1 (ko) * | 2006-12-04 | 2008-06-30 | 김광택 | 광섬유 수소 센서 및 이를 적용한 수소 농도 측정장치 |
| JP2008286542A (ja) * | 2007-05-15 | 2008-11-27 | Japan Atomic Energy Agency | 水素ガス検知膜 |
| JP2011521278A (ja) * | 2008-04-18 | 2011-07-21 | ソニー デーアーデーツェー オーストリア アクチェンゲゼルシャフト | 光導波路の製造方法、光導波路及びセンサアレンジメント |
| CN103308451A (zh) * | 2013-05-20 | 2013-09-18 | 重庆科技学院 | 一种微型光纤氢气传感装置及测量方法 |
| WO2015152712A1 (en) | 2014-03-31 | 2015-10-08 | Technische Universiteit Delft | Single element hydrogen sensing material |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60209149A (ja) * | 1984-03-31 | 1985-10-21 | Nippon Sheet Glass Co Ltd | 水素感知器 |
-
1985
- 1985-03-08 JP JP60044647A patent/JPS61204545A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60209149A (ja) * | 1984-03-31 | 1985-10-21 | Nippon Sheet Glass Co Ltd | 水素感知器 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63307335A (ja) * | 1987-05-22 | 1988-12-15 | アメリカン テレフォン アンド テレグラフ カムパニー | 広域センサ、広域検出方法及びその装置 |
| US5733506A (en) * | 1989-11-08 | 1998-03-31 | British Technology Group, Ltd. | Gas sensors and compounds suitable therefor |
| GB2408796A (en) * | 2003-12-01 | 2005-06-08 | Stephen Richard Elliott | Raman gain or loss effect optical sensor chip |
| JP2007071866A (ja) * | 2005-08-10 | 2007-03-22 | Tokyo Univ Of Science | ガスセンサ用薄膜、ガスセンサ用素子体およびガスセンサ用素子体の製造方法 |
| KR100842119B1 (ko) * | 2006-12-04 | 2008-06-30 | 김광택 | 광섬유 수소 센서 및 이를 적용한 수소 농도 측정장치 |
| JP2008286542A (ja) * | 2007-05-15 | 2008-11-27 | Japan Atomic Energy Agency | 水素ガス検知膜 |
| JP2011521278A (ja) * | 2008-04-18 | 2011-07-21 | ソニー デーアーデーツェー オーストリア アクチェンゲゼルシャフト | 光導波路の製造方法、光導波路及びセンサアレンジメント |
| US8811790B2 (en) | 2008-04-18 | 2014-08-19 | Sony Dadc Austria Ag | Method for manufacturing an optical waveguide, optical waveguide, and sensor arrangement |
| CN103308451A (zh) * | 2013-05-20 | 2013-09-18 | 重庆科技学院 | 一种微型光纤氢气传感装置及测量方法 |
| WO2015152712A1 (en) | 2014-03-31 | 2015-10-08 | Technische Universiteit Delft | Single element hydrogen sensing material |
| NL2012534A (en) * | 2014-03-31 | 2016-01-08 | Univ Delft Tech | Single element hydrogen sensing material, based on hafnium. |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0223826B2 (enrdf_load_stackoverflow) | 1990-05-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |