JPH0481738B2 - - Google Patents
Info
- Publication number
- JPH0481738B2 JPH0481738B2 JP61011092A JP1109286A JPH0481738B2 JP H0481738 B2 JPH0481738 B2 JP H0481738B2 JP 61011092 A JP61011092 A JP 61011092A JP 1109286 A JP1109286 A JP 1109286A JP H0481738 B2 JPH0481738 B2 JP H0481738B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- light
- optical fiber
- hydrogen
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 35
- 239000013307 optical fiber Substances 0.000 claims description 31
- 239000001257 hydrogen Substances 0.000 claims description 24
- 229910052739 hydrogen Inorganic materials 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000001514 detection method Methods 0.000 claims description 16
- 230000031700 light absorption Effects 0.000 claims description 16
- 239000010409 thin film Substances 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 239000010408 film Substances 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 7
- 230000001902 propagating effect Effects 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 230000002238 attenuated effect Effects 0.000 description 4
- 238000000151 deposition Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 125000004802 cyanophenyl group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
- G01N21/77—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator
- G01N21/7703—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated by observing the effect on a chemical indicator using reagent-clad optical fibres or optical waveguides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011092A JPS62170838A (ja) | 1986-01-23 | 1986-01-23 | 反射型水素検知光センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61011092A JPS62170838A (ja) | 1986-01-23 | 1986-01-23 | 反射型水素検知光センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170838A JPS62170838A (ja) | 1987-07-27 |
| JPH0481738B2 true JPH0481738B2 (enrdf_load_stackoverflow) | 1992-12-24 |
Family
ID=11768348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61011092A Granted JPS62170838A (ja) | 1986-01-23 | 1986-01-23 | 反射型水素検知光センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62170838A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005054458A1 (ja) * | 2003-12-03 | 2005-06-16 | Hitachi High-Technologies Corporation | 核酸分析方法、核酸分析用セル、および核酸分析装置 |
| JP2010515022A (ja) * | 2006-12-20 | 2010-05-06 | スリーエム イノベイティブ プロパティズ カンパニー | 検出システム |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0197249U (enrdf_load_stackoverflow) * | 1987-12-21 | 1989-06-28 | ||
| EP1291642A1 (en) * | 2001-09-05 | 2003-03-12 | Linde Medical Sensors AG | Sensor system comprising an integrated optical waveguide for the detection of chemical substances |
| DE102006054165B3 (de) * | 2006-11-16 | 2008-04-17 | Tyco Electronics Raychem Gmbh | Langzeitstabile optische Sensoranordnung, insbesondere Wasserstoffsensor, und kombinierte Gassensoranordnung |
-
1986
- 1986-01-23 JP JP61011092A patent/JPS62170838A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005054458A1 (ja) * | 2003-12-03 | 2005-06-16 | Hitachi High-Technologies Corporation | 核酸分析方法、核酸分析用セル、および核酸分析装置 |
| JP2010515022A (ja) * | 2006-12-20 | 2010-05-06 | スリーエム イノベイティブ プロパティズ カンパニー | 検出システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62170838A (ja) | 1987-07-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6535658B1 (en) | Hydrogen sensor apparatus and method of fabrication | |
| CA2233305C (en) | Integrated optic interferometric sensor | |
| Del Villar et al. | Lossy mode resonance generation with indium-tin-oxide-coated optical fibers for sensing applications | |
| Lavers et al. | A waveguide-coupled surface-plasmon sensor for an aqueous environment | |
| Tiefenthaler et al. | Grating couplers as integrated optical humidity and gas sensors | |
| KR20110104916A (ko) | 수소 순도 측정 시스템, 수소 순도 센서 및 수소 순도 센서 패키지 | |
| EP2085768B1 (en) | Hydrogen gas detector | |
| WO2003025639A2 (en) | Optical transmission device having a long period grating and an overcladding | |
| JPH0481738B2 (enrdf_load_stackoverflow) | ||
| JPH0513458B2 (enrdf_load_stackoverflow) | ||
| JP3655904B2 (ja) | 光反射型センサ及びその構造 | |
| JPH0223826B2 (enrdf_load_stackoverflow) | ||
| US5245410A (en) | Optical fiber sensor based on the excitation of surface plasmon | |
| CN114609052A (zh) | 一种光纤氢气浓度探测装置 | |
| JPH05196569A (ja) | 水素センサ | |
| JPH0210374B2 (enrdf_load_stackoverflow) | ||
| Tiefenthaler et al. | Integrated optical humidity and gas sensors | |
| KR100977810B1 (ko) | 경사증착 광학박막을 사용한 습도센서 | |
| KR100767535B1 (ko) | 연료전지용 광섬유 수소센서 | |
| JPS60209149A (ja) | 水素感知器 | |
| Fuentes et al. | Simultaneous Measurement of Refractive Index and Temperature using LMR on planar waveguide | |
| Maciak et al. | Pd/V $ _ {2} $ O $ _ {5} $ fiber optic hydrogen gas sensor | |
| JPS61207950A (ja) | 水素検知光センサ− | |
| GB2307741A (en) | Polymer-based integrated optical sensors | |
| Nishizawa et al. | High sensitivity waveguide-type hydrogen sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |