JPS61201148A - 発熱体支持構造 - Google Patents

発熱体支持構造

Info

Publication number
JPS61201148A
JPS61201148A JP4120785A JP4120785A JPS61201148A JP S61201148 A JPS61201148 A JP S61201148A JP 4120785 A JP4120785 A JP 4120785A JP 4120785 A JP4120785 A JP 4120785A JP S61201148 A JPS61201148 A JP S61201148A
Authority
JP
Japan
Prior art keywords
heating element
heater
bridge
space
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4120785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH053896B2 (enrdf_load_stackoverflow
Inventor
Junji Manaka
順二 間中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Seiki Co Ltd
Original Assignee
Ricoh Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Seiki Co Ltd filed Critical Ricoh Seiki Co Ltd
Priority to JP4120785A priority Critical patent/JPS61201148A/ja
Publication of JPS61201148A publication Critical patent/JPS61201148A/ja
Publication of JPH053896B2 publication Critical patent/JPH053896B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Surface Heating Bodies (AREA)
  • Control Of Resistance Heating (AREA)
JP4120785A 1985-03-04 1985-03-04 発熱体支持構造 Granted JPS61201148A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4120785A JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4120785A JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Publications (2)

Publication Number Publication Date
JPS61201148A true JPS61201148A (ja) 1986-09-05
JPH053896B2 JPH053896B2 (enrdf_load_stackoverflow) 1993-01-18

Family

ID=12601961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4120785A Granted JPS61201148A (ja) 1985-03-04 1985-03-04 発熱体支持構造

Country Status (1)

Country Link
JP (1) JPS61201148A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0196548A (ja) * 1987-10-07 1989-04-14 Sharp Corp センサ素子
US5048336A (en) * 1988-12-29 1991-09-17 Sharp Kabushiki Kaisha Moisture-sensitive device
JP2018096874A (ja) * 2016-12-14 2018-06-21 日本特殊陶業株式会社 呼気センサ
WO2018185159A1 (de) * 2017-04-07 2018-10-11 Siemens Aktiengesellschaft Substrataufbau für einen gassensor oder eine infrarot-lichtquelle
JP2020193813A (ja) * 2019-05-24 2020-12-03 国立大学法人大阪大学 物性測定装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013218840A1 (de) * 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0196548A (ja) * 1987-10-07 1989-04-14 Sharp Corp センサ素子
US5048336A (en) * 1988-12-29 1991-09-17 Sharp Kabushiki Kaisha Moisture-sensitive device
JP2018096874A (ja) * 2016-12-14 2018-06-21 日本特殊陶業株式会社 呼気センサ
WO2018110117A1 (ja) * 2016-12-14 2018-06-21 日本特殊陶業株式会社 呼気センサ
WO2018185159A1 (de) * 2017-04-07 2018-10-11 Siemens Aktiengesellschaft Substrataufbau für einen gassensor oder eine infrarot-lichtquelle
JP2020193813A (ja) * 2019-05-24 2020-12-03 国立大学法人大阪大学 物性測定装置

Also Published As

Publication number Publication date
JPH053896B2 (enrdf_load_stackoverflow) 1993-01-18

Similar Documents

Publication Publication Date Title
JPS6140154B2 (enrdf_load_stackoverflow)
JP2002286673A (ja) ガスセンサ及びその製造方法
KR100917792B1 (ko) 반사판을 구비한 마이크로 히터 및 그 제조방법
JP2004200619A (ja) ウエハ支持部材
JPS61201148A (ja) 発熱体支持構造
JP4055697B2 (ja) 赤外線光源
JP2002231862A (ja) 半導体装置及びチップキャリア
US7185539B2 (en) Flow sensor
TWI750750B (zh) 溫度感測器及加熱器單元
JP4396464B2 (ja) 赤外線放射素子およびそれを用いたガスセンサ
JP5672742B2 (ja) 赤外線温度センサ
JP5406082B2 (ja) サーモパイル型赤外線センサおよびその製造方法
JPS61191953A (ja) ガス検出装置
JP3751801B2 (ja) 熱型センサ
JPS63172948A (ja) ガスセンサ
JPS59143946A (ja) ガス検出装置
KR102351851B1 (ko) 히터 코어, 히터 및 이를 포함하는 히팅 시스템
JP2003294670A (ja) 薄膜ガスセンサ
JPH079411B2 (ja) 雰囲気検出装置
JP2003294671A (ja) 薄膜ガスセンサ
JP3132210B2 (ja) ガスセンサ
JP2005207891A (ja) 赤外線光源、及び、赤外線検知式ガスセンサ
JP2014153134A (ja) 赤外光源素子
JP2003347287A (ja) ウエハ支持部材
JP3563726B2 (ja) ウエハ支持部材

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees