JPS6120041Y2 - - Google Patents

Info

Publication number
JPS6120041Y2
JPS6120041Y2 JP1983063186U JP6318683U JPS6120041Y2 JP S6120041 Y2 JPS6120041 Y2 JP S6120041Y2 JP 1983063186 U JP1983063186 U JP 1983063186U JP 6318683 U JP6318683 U JP 6318683U JP S6120041 Y2 JPS6120041 Y2 JP S6120041Y2
Authority
JP
Japan
Prior art keywords
raw material
crucible
melt
substrate
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983063186U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169368U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1983063186U priority Critical patent/JPS59169368U/ja
Publication of JPS59169368U publication Critical patent/JPS59169368U/ja
Application granted granted Critical
Publication of JPS6120041Y2 publication Critical patent/JPS6120041Y2/ja
Granted legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1983063186U 1983-04-27 1983-04-27 液相エピタキシヤル成長装置 Granted JPS59169368U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983063186U JPS59169368U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983063186U JPS59169368U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS59169368U JPS59169368U (ja) 1984-11-13
JPS6120041Y2 true JPS6120041Y2 (enExample) 1986-06-17

Family

ID=30193378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983063186U Granted JPS59169368U (ja) 1983-04-27 1983-04-27 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS59169368U (enExample)

Also Published As

Publication number Publication date
JPS59169368U (ja) 1984-11-13

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