JPS6120035U - Vapor phase growth equipment - Google Patents
Vapor phase growth equipmentInfo
- Publication number
- JPS6120035U JPS6120035U JP10390184U JP10390184U JPS6120035U JP S6120035 U JPS6120035 U JP S6120035U JP 10390184 U JP10390184 U JP 10390184U JP 10390184 U JP10390184 U JP 10390184U JP S6120035 U JPS6120035 U JP S6120035U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- heat source
- growth apparatus
- susceptor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図ないし第４図は本考案の一実施例を示すもので、
第１図は気相成長装置の構成を概略的に示す概略的断面
図、第２図は要部である反射部材の概略的平面図、第３
図は第２図■−■線に沿う断面図、第４図は加熱状態の
説明図、第５図は従来装置の概略的断面図である。
２・・・・・・石英ベルジャー、３・・・・・・半導体
基板（ウエハー）、４・・・・・・サセプタ、５・・・
・・・主熱源（高周波コイル）、６・・・・・・ノズル
、８・・・・・・反応室、９・・・・・・金属製ベルジ
ャー、１０・・・・・・補助熱源（ハロゲンランプ）、
１１・・・・・・反射部材（反射ミラー）、１１ａ・−
・・・・・中心部ミラー（分割反射部材）、ｌｌｂ・・
・・・・揺動ミラー（分割反射部材）。Figures 1 to 4 show an embodiment of the present invention.
FIG. 1 is a schematic cross-sectional view schematically showing the structure of the vapor phase growth apparatus, FIG. 2 is a schematic plan view of a reflecting member which is the main part, and FIG.
The figures are a sectional view taken along line 2--2 in FIG. 2, FIG. 4 is an explanatory view of the heating state, and FIG. 5 is a schematic sectional view of the conventional device. 2...Quartz bell jar, 3...Semiconductor substrate (wafer), 4...Susceptor, 5...
...Main heat source (high frequency coil), 6...Nozzle, 8...Reaction chamber, 9...Metal bell jar, 10...Auxiliary heat source ( Halogen lamp),
11...Reflection member (reflection mirror), 11a.-
...Center mirror (divided reflective member), llb...
...Owing mirror (divided reflective member).
Claims (3)
ｉタを主熱源で加熱するとともにサセプタ上の半導体基
板を前記反応室を形成する石英ベルジャーの外側、かつ
、前記サセプタと対向する状態に設けられ、背部を反射
部材で囲繞された補助熱源によって加熱するようにした
気相成長装置であって、補助熱源の背部を囲繞する前記
反射部材を、反射角を調整できる複数個の分割反射部材
で構成したことを特徴とする気相成長装置。(1) A state in which a susceptor provided in a reaction chamber and on which a semiconductor substrate is placed is heated by a main heat source, and the semiconductor substrate on the susceptor is placed outside the quartz bell jar forming the reaction chamber and facing the susceptor. A vapor phase growth apparatus is provided in which the back part of the vapor phase growth apparatus is heated by an auxiliary heat source surrounded by a reflective member, and the reflective member surrounding the back part of the auxiliary heat source is divided into a plurality of divided reflectors whose reflection angles can be adjusted. A vapor phase growth apparatus characterized in that it is composed of members.
囲に配設された複数個の揺動ミラーとからなることを特
徴とする実用新案登録請求の範囲第１項記載の気相成長
装置。(2) Vapor phase growth according to claim 1 of the utility model registration, characterized in that the plurality of divided reflection members are composed of a central mirror and a plurality of swinging mirrors arranged around the center mirror. Device.
ゲンランプからなることを特徴とする実用新案登録請求
の範囲第１項記載の気相成長装置。(3) The vapor phase growth apparatus according to claim 1, wherein the auxiliary heat source comprises a halogen lamp whose back is surrounded by a reflective member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10390184U JPS6120035U (en) | 1984-07-10 | 1984-07-10 | Vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10390184U JPS6120035U (en) | 1984-07-10 | 1984-07-10 | Vapor phase growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6120035U true JPS6120035U (en) | 1986-02-05 |
Family
ID=30663270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10390184U Pending JPS6120035U (en) | 1984-07-10 | 1984-07-10 | Vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6120035U (en) |
-
1984
- 1984-07-10 JP JP10390184U patent/JPS6120035U/en active Pending
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