JPS61196523U - - Google Patents
Info
- Publication number
- JPS61196523U JPS61196523U JP7927385U JP7927385U JPS61196523U JP S61196523 U JPS61196523 U JP S61196523U JP 7927385 U JP7927385 U JP 7927385U JP 7927385 U JP7927385 U JP 7927385U JP S61196523 U JPS61196523 U JP S61196523U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- chemical vapor
- chamber
- reaction gas
- inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005229 chemical vapour deposition Methods 0.000 claims description 9
- 239000012495 reaction gas Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927385U JPS61196523U (fr) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7927385U JPS61196523U (fr) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196523U true JPS61196523U (fr) | 1986-12-08 |
Family
ID=30624032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7927385U Pending JPS61196523U (fr) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196523U (fr) |
-
1985
- 1985-05-29 JP JP7927385U patent/JPS61196523U/ja active Pending
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