JPH01133728U - - Google Patents

Info

Publication number
JPH01133728U
JPH01133728U JP3085288U JP3085288U JPH01133728U JP H01133728 U JPH01133728 U JP H01133728U JP 3085288 U JP3085288 U JP 3085288U JP 3085288 U JP3085288 U JP 3085288U JP H01133728 U JPH01133728 U JP H01133728U
Authority
JP
Japan
Prior art keywords
reaction tube
supported
quartz
pedestal
quartz reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3085288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085547Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988030852U priority Critical patent/JPH085547Y2/ja
Publication of JPH01133728U publication Critical patent/JPH01133728U/ja
Application granted granted Critical
Publication of JPH085547Y2 publication Critical patent/JPH085547Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988030852U 1988-03-07 1988-03-07 縦型拡散装置 Expired - Lifetime JPH085547Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988030852U JPH085547Y2 (ja) 1988-03-07 1988-03-07 縦型拡散装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988030852U JPH085547Y2 (ja) 1988-03-07 1988-03-07 縦型拡散装置

Publications (2)

Publication Number Publication Date
JPH01133728U true JPH01133728U (fr) 1989-09-12
JPH085547Y2 JPH085547Y2 (ja) 1996-02-14

Family

ID=31256273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988030852U Expired - Lifetime JPH085547Y2 (ja) 1988-03-07 1988-03-07 縦型拡散装置

Country Status (1)

Country Link
JP (1) JPH085547Y2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011129201A1 (fr) * 2010-04-14 2011-10-20 三菱重工業株式会社 Dispositif de chauffage de fluide caloporteur et appareil de climatisation de véhicule utilisant un tel dispositif

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100141U (fr) * 1984-12-07 1986-06-26
JPS62166624U (fr) * 1986-04-14 1987-10-22
JPS62245623A (ja) * 1986-04-18 1987-10-26 Hitachi Ltd 熱処理装置
JPS63161610A (ja) * 1986-12-25 1988-07-05 Toshiba Ceramics Co Ltd ウエ−ハボ−ト

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61100141U (fr) * 1984-12-07 1986-06-26
JPS62166624U (fr) * 1986-04-14 1987-10-22
JPS62245623A (ja) * 1986-04-18 1987-10-26 Hitachi Ltd 熱処理装置
JPS63161610A (ja) * 1986-12-25 1988-07-05 Toshiba Ceramics Co Ltd ウエ−ハボ−ト

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011129201A1 (fr) * 2010-04-14 2011-10-20 三菱重工業株式会社 Dispositif de chauffage de fluide caloporteur et appareil de climatisation de véhicule utilisant un tel dispositif
JP2011219060A (ja) * 2010-04-14 2011-11-04 Mitsubishi Heavy Ind Ltd 熱媒体加熱装置およびそれを用いた車両用空調装置
US10024575B2 (en) 2010-04-14 2018-07-17 Mitsubishi Heavy Industries, Ltd. Heating-medium heating unit and vehicle air conditioner using the same

Also Published As

Publication number Publication date
JPH085547Y2 (ja) 1996-02-14

Similar Documents

Publication Publication Date Title
JPH01133728U (fr)
JPH0357945U (fr)
JP2602307Y2 (ja) 表面処理装置
JPH01122064U (fr)
JPH01137525U (fr)
JPS63119234U (fr)
JPS6183032U (fr)
JPS62203272U (fr)
JPS61106025U (fr)
JPS62186421U (fr)
JPS63170465U (fr)
JPS62142839U (fr)
JPS6315049U (fr)
JPS6422025U (fr)
JPS6338314U (fr)
JPS6395234U (fr)
JPS6255342U (fr)
JPH0529129U (ja) 枚葉式cvd装置のサセプタ
JPH01110231U (fr)
JPS6329945U (fr)
JPS61137294U (fr)
JPS61115945U (fr)
JPS63106766U (fr)
JPS6389239U (fr)
JPS60165462U (ja) 反応管装置