JPS6315049U - - Google Patents

Info

Publication number
JPS6315049U
JPS6315049U JP10807986U JP10807986U JPS6315049U JP S6315049 U JPS6315049 U JP S6315049U JP 10807986 U JP10807986 U JP 10807986U JP 10807986 U JP10807986 U JP 10807986U JP S6315049 U JPS6315049 U JP S6315049U
Authority
JP
Japan
Prior art keywords
film
wafer
circular
sucking
holds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10807986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10807986U priority Critical patent/JPS6315049U/ja
Publication of JPS6315049U publication Critical patent/JPS6315049U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Registering Or Overturning Sheets (AREA)
JP10807986U 1986-07-16 1986-07-16 Pending JPS6315049U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10807986U JPS6315049U (fr) 1986-07-16 1986-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10807986U JPS6315049U (fr) 1986-07-16 1986-07-16

Publications (1)

Publication Number Publication Date
JPS6315049U true JPS6315049U (fr) 1988-02-01

Family

ID=30984943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10807986U Pending JPS6315049U (fr) 1986-07-16 1986-07-16

Country Status (1)

Country Link
JP (1) JPS6315049U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537606U (ja) * 1991-10-28 1993-05-21 ダイハツ工業株式会社 自動車用グリルの取付構造
JP2006281434A (ja) * 2005-03-11 2006-10-19 Disco Abrasive Syst Ltd ウェーハの保持機構

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0537606U (ja) * 1991-10-28 1993-05-21 ダイハツ工業株式会社 自動車用グリルの取付構造
JP2006281434A (ja) * 2005-03-11 2006-10-19 Disco Abrasive Syst Ltd ウェーハの保持機構
JP4705450B2 (ja) * 2005-03-11 2011-06-22 株式会社ディスコ ウェーハの保持機構

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