JPS61194951U - - Google Patents

Info

Publication number
JPS61194951U
JPS61194951U JP7922885U JP7922885U JPS61194951U JP S61194951 U JPS61194951 U JP S61194951U JP 7922885 U JP7922885 U JP 7922885U JP 7922885 U JP7922885 U JP 7922885U JP S61194951 U JPS61194951 U JP S61194951U
Authority
JP
Japan
Prior art keywords
electron beam
electron
sample
lens system
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7922885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7922885U priority Critical patent/JPS61194951U/ja
Publication of JPS61194951U publication Critical patent/JPS61194951U/ja
Pending legal-status Critical Current

Links

JP7922885U 1985-05-29 1985-05-29 Pending JPS61194951U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7922885U JPS61194951U (enExample) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7922885U JPS61194951U (enExample) 1985-05-29 1985-05-29

Publications (1)

Publication Number Publication Date
JPS61194951U true JPS61194951U (enExample) 1986-12-04

Family

ID=30623944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7922885U Pending JPS61194951U (enExample) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPS61194951U (enExample)

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