JPS61191886U - - Google Patents

Info

Publication number
JPS61191886U
JPS61191886U JP7414585U JP7414585U JPS61191886U JP S61191886 U JPS61191886 U JP S61191886U JP 7414585 U JP7414585 U JP 7414585U JP 7414585 U JP7414585 U JP 7414585U JP S61191886 U JPS61191886 U JP S61191886U
Authority
JP
Japan
Prior art keywords
wafers
arm
storage member
work station
swing arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7414585U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451995Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985074145U priority Critical patent/JPH0451995Y2/ja
Publication of JPS61191886U publication Critical patent/JPS61191886U/ja
Application granted granted Critical
Publication of JPH0451995Y2 publication Critical patent/JPH0451995Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Specific Conveyance Elements (AREA)
JP1985074145U 1985-05-21 1985-05-21 Expired JPH0451995Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985074145U JPH0451995Y2 (enExample) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985074145U JPH0451995Y2 (enExample) 1985-05-21 1985-05-21

Publications (2)

Publication Number Publication Date
JPS61191886U true JPS61191886U (enExample) 1986-11-29
JPH0451995Y2 JPH0451995Y2 (enExample) 1992-12-07

Family

ID=30614165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985074145U Expired JPH0451995Y2 (enExample) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPH0451995Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428933A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-surface inspection device
JPH02132842A (ja) * 1988-07-13 1990-05-22 Tel Sagami Ltd 半導体ウエハの移載装置
JP2000042953A (ja) * 1998-07-29 2000-02-15 Janome Sewing Mach Co Ltd 水平多関節ロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155195A (ja) * 1982-03-05 1983-09-14 株式会社小松製作所 ロボツトア−ム装置
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155195A (ja) * 1982-03-05 1983-09-14 株式会社小松製作所 ロボツトア−ム装置
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6428933A (en) * 1987-07-24 1989-01-31 Hitachi Electr Eng Wafer-surface inspection device
JPH02132842A (ja) * 1988-07-13 1990-05-22 Tel Sagami Ltd 半導体ウエハの移載装置
JP2000042953A (ja) * 1998-07-29 2000-02-15 Janome Sewing Mach Co Ltd 水平多関節ロボット

Also Published As

Publication number Publication date
JPH0451995Y2 (enExample) 1992-12-07

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