JPS6119118B2 - - Google Patents

Info

Publication number
JPS6119118B2
JPS6119118B2 JP56500210A JP50021081A JPS6119118B2 JP S6119118 B2 JPS6119118 B2 JP S6119118B2 JP 56500210 A JP56500210 A JP 56500210A JP 50021081 A JP50021081 A JP 50021081A JP S6119118 B2 JPS6119118 B2 JP S6119118B2
Authority
JP
Japan
Prior art keywords
water
package
hygroscopic
getter
gold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56500210A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56501785A (enExample
Inventor
Jeimuzu Uiriamu Seiuari
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JPS56501785A publication Critical patent/JPS56501785A/ja
Publication of JPS6119118B2 publication Critical patent/JPS6119118B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W76/00—Containers; Fillings or auxiliary members therefor; Seals
    • H10W76/40—Fillings or auxiliary members in containers, e.g. centering rings
    • H10W76/42—Fillings
    • H10W76/48—Fillings including materials for absorbing or reacting with moisture or other undesired substances

Landscapes

  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Drying Of Gases (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)
JP56500210A 1979-11-09 1981-11-07 Expired JPS6119118B2 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/092,695 US4280885A (en) 1979-11-09 1979-11-09 Method of and apparatus for active electro-chemical water and similar environmental contaminant elimination in semi-conductor and other electronic and electrical devices and the like

Publications (2)

Publication Number Publication Date
JPS56501785A JPS56501785A (enExample) 1981-12-03
JPS6119118B2 true JPS6119118B2 (enExample) 1986-05-15

Family

ID=22234602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56500210A Expired JPS6119118B2 (enExample) 1979-11-09 1981-11-07

Country Status (7)

Country Link
US (1) US4280885A (enExample)
EP (1) EP0043818A1 (enExample)
JP (1) JPS6119118B2 (enExample)
CA (1) CA1185920A (enExample)
DE (1) DE3050032C2 (enExample)
GB (1) GB2075064B (enExample)
WO (1) WO1981001423A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4622433A (en) * 1984-03-30 1986-11-11 Diacon, Inc. Ceramic package system using low temperature sealing glasses
US4707244A (en) * 1986-01-21 1987-11-17 Beckman Industrial Corporation Solid state sensor element
JPH03502488A (ja) * 1988-02-08 1991-06-06 ローズマウント　インコ． 薄膜水分検出素子およびその製造方法
US4990236A (en) * 1988-02-08 1991-02-05 Rosemount Inc. Thin film moisture sensing element
US4915816A (en) * 1988-09-06 1990-04-10 Parthasarathy Shakkottai Polymer hygrometer for harsh environments
JP2978226B2 (ja) * 1990-09-26 1999-11-15 三菱電機株式会社 半導体集積回路
US5371178A (en) * 1990-10-24 1994-12-06 Johnson Matthey Inc. Rapidly curing adhesive and method
US5386000A (en) * 1990-10-24 1995-01-31 Johnson Matthey Inc. Low temperature flexible die attach adhesive and articles using same
US5250600A (en) * 1992-05-28 1993-10-05 Johnson Matthey Inc. Low temperature flexible die attach adhesive and articles using same
IT1251763B (it) * 1991-11-06 1995-05-23 Getters Spa Dispositivo per misurare con precisione la presenza di umidita'
US5524422A (en) * 1992-02-28 1996-06-11 Johnson Matthey Inc. Materials with low moisture outgassing properties and method of reducing moisture content of hermetic packages containing semiconductor devices
US5195299B1 (en) * 1992-02-28 1996-02-13 Johnson Matthey Inc Method of reducing moisture content of hermetic packages containing semiconductor devices
US5837935A (en) * 1996-02-26 1998-11-17 Ford Motor Company Hermetic seal for an electronic component having a secondary chamber
ZA975891B (en) * 1996-07-05 1998-07-23 Combimatrix Corp Electrochemical solid phase synthesis of polymers

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1677032A (en) * 1926-11-09 1928-07-10 Kaffer Joan Willem Jules Electrical heating and cooking apparatus
US2351282A (en) * 1940-04-27 1944-06-13 Jr William Harold Oliver Microscopic slide
US2816067A (en) * 1955-05-03 1957-12-10 Du Pont Electrolytic drying method
US3240693A (en) * 1961-08-28 1966-03-15 Beckman Instruments Inc Hygrometer
US3223609A (en) * 1961-10-30 1965-12-14 Beckman Instruments Inc Hygrometer
US3923629A (en) * 1974-03-25 1975-12-02 Carborundum Co Electrolytic cell for inactivation and destruction of pathogenic material
US4094751A (en) * 1976-09-30 1978-06-13 Allied Chemical Corporation Photochemical diodes

Also Published As

Publication number Publication date
DE3050032T1 (enExample) 1982-03-25
WO1981001423A1 (en) 1981-05-28
US4280885A (en) 1981-07-28
EP0043818A1 (en) 1982-01-20
CA1185920A (en) 1985-04-23
JPS56501785A (enExample) 1981-12-03
DE3050032C2 (de) 1987-06-11
GB2075064B (en) 1983-10-12
GB2075064A (en) 1981-11-11

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