ATE125946T1 - Dünnfilmfeuchtigkeitprüfelemente und verfahren zur herstellung. - Google Patents

Dünnfilmfeuchtigkeitprüfelemente und verfahren zur herstellung.

Info

Publication number
ATE125946T1
ATE125946T1 AT89902875T AT89902875T ATE125946T1 AT E125946 T1 ATE125946 T1 AT E125946T1 AT 89902875 T AT89902875 T AT 89902875T AT 89902875 T AT89902875 T AT 89902875T AT E125946 T1 ATE125946 T1 AT E125946T1
Authority
AT
Austria
Prior art keywords
thin film
producing
test elements
film moisture
moisture test
Prior art date
Application number
AT89902875T
Other languages
English (en)
Inventor
Fred C Sittler
Radhakrishna M Neti
Adrian C Toy
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Application granted granted Critical
Publication of ATE125946T1 publication Critical patent/ATE125946T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems
    • G01N27/42Measuring deposition or liberation of materials from an electrolyte; Coulometry, i.e. measuring coulomb-equivalent of material in an electrolyte
    • G01N27/423Coulometry

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
AT89902875T 1988-02-08 1989-02-07 Dünnfilmfeuchtigkeitprüfelemente und verfahren zur herstellung. ATE125946T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15316888A 1988-02-08 1988-02-08

Publications (1)

Publication Number Publication Date
ATE125946T1 true ATE125946T1 (de) 1995-08-15

Family

ID=22546055

Family Applications (1)

Application Number Title Priority Date Filing Date
AT89902875T ATE125946T1 (de) 1988-02-08 1989-02-07 Dünnfilmfeuchtigkeitprüfelemente und verfahren zur herstellung.

Country Status (6)

Country Link
EP (1) EP0400063B1 (de)
JP (1) JPH03502488A (de)
AT (1) ATE125946T1 (de)
CA (1) CA1316715C (de)
DE (1) DE68923699T2 (de)
WO (1) WO1989007264A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4427627C2 (de) * 1994-08-04 1999-03-11 Leybold Ag Regensensor
US5589085A (en) * 1995-08-04 1996-12-31 Meeco, Incorporated Process of manufacturing a detecting unit for an electrolytic cell with thin film electrodes
JP5120966B2 (ja) * 2009-12-21 2013-01-16 独立行政法人産業技術総合研究所 極微量水分計測素子および該計測素子を用いた防湿封止性能評価方法
DE102021000257A1 (de) 2021-01-20 2022-07-21 Ech Elektrochemie Halle Gmbh Verfahren und Vorrichtung zur quantitativen Bestimmung des in Gasen enthaltenen Wassers

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT586875A (de) * 1957-04-09 1900-01-01
NL246885A (de) * 1958-12-31 1900-01-01
US3133872A (en) * 1959-03-10 1964-05-19 Chemionics Engineering Lab Inc Anode for electrochemical applications
US3001918A (en) * 1959-07-13 1961-09-26 Cons Electrodynamics Corp Method and apparatus for water content determination
US3223609A (en) * 1961-10-30 1965-12-14 Beckman Instruments Inc Hygrometer
US3337441A (en) * 1963-08-19 1967-08-22 Atomic Energy Authority Uk Phosphoric acid-glycerine electrolyte for hygroscopic cell
US3954590A (en) * 1972-08-18 1976-05-04 E. I. Du Pont De Nemours And Company Iridium thin ribbon electrodes for electrochemical cells
US4280885A (en) * 1979-11-09 1981-07-28 Savery James W Method of and apparatus for active electro-chemical water and similar environmental contaminant elimination in semi-conductor and other electronic and electrical devices and the like
EP0095277A3 (de) * 1982-05-26 1984-07-04 City Technology Limited Gasfühler
JPS60188835A (ja) * 1984-03-08 1985-09-26 Sharp Corp 感湿素子
US4707244A (en) * 1986-01-21 1987-11-17 Beckman Industrial Corporation Solid state sensor element

Also Published As

Publication number Publication date
WO1989007264A1 (en) 1989-08-10
EP0400063A4 (en) 1992-12-02
DE68923699D1 (de) 1995-09-07
EP0400063A1 (de) 1990-12-05
CA1316715C (en) 1993-04-27
JPH03502488A (ja) 1991-06-06
EP0400063B1 (de) 1995-08-02
DE68923699T2 (de) 1996-03-21

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Legal Events

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