JPS6119046A - 収束電子線回折用電子顕微鏡 - Google Patents

収束電子線回折用電子顕微鏡

Info

Publication number
JPS6119046A
JPS6119046A JP59139521A JP13952184A JPS6119046A JP S6119046 A JPS6119046 A JP S6119046A JP 59139521 A JP59139521 A JP 59139521A JP 13952184 A JP13952184 A JP 13952184A JP S6119046 A JPS6119046 A JP S6119046A
Authority
JP
Japan
Prior art keywords
condenser lens
lens
electron beam
focal length
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59139521A
Other languages
English (en)
Japanese (ja)
Other versions
JPH043620B2 (enrdf_load_stackoverflow
Inventor
Shigeto Sunakozawa
成人 砂子沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59139521A priority Critical patent/JPS6119046A/ja
Publication of JPS6119046A publication Critical patent/JPS6119046A/ja
Publication of JPH043620B2 publication Critical patent/JPH043620B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP59139521A 1984-07-04 1984-07-04 収束電子線回折用電子顕微鏡 Granted JPS6119046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59139521A JPS6119046A (ja) 1984-07-04 1984-07-04 収束電子線回折用電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59139521A JPS6119046A (ja) 1984-07-04 1984-07-04 収束電子線回折用電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6119046A true JPS6119046A (ja) 1986-01-27
JPH043620B2 JPH043620B2 (enrdf_load_stackoverflow) 1992-01-23

Family

ID=15247221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59139521A Granted JPS6119046A (ja) 1984-07-04 1984-07-04 収束電子線回折用電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6119046A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271338A (ja) * 1986-05-16 1987-11-25 Jeol Ltd 収束電子線回折装置
JPH0877957A (ja) * 1994-09-06 1996-03-22 Hitachi Ltd 荷電粒子投射装置
WO2013161473A1 (ja) * 2012-04-27 2013-10-31 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5169802B2 (ja) 2008-12-24 2013-03-27 富士通株式会社 ネットワーク装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples
JPS5765655A (en) * 1980-10-07 1982-04-21 Internatl Precision Inc Electron microscope
JPS60193248A (ja) * 1984-03-15 1985-10-01 Internatl Precision Inc 電子線装置の電子線照射方法
JPS614142A (ja) * 1984-06-16 1986-01-10 Jeol Ltd 電子顕微鏡

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51124371A (en) * 1975-04-23 1976-10-29 Jeol Ltd Scanning type electron microscope and similar equipment provided with means for controlling opening angle of electron beam for irradiating s amples
JPS5765655A (en) * 1980-10-07 1982-04-21 Internatl Precision Inc Electron microscope
JPS60193248A (ja) * 1984-03-15 1985-10-01 Internatl Precision Inc 電子線装置の電子線照射方法
JPS614142A (ja) * 1984-06-16 1986-01-10 Jeol Ltd 電子顕微鏡

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62271338A (ja) * 1986-05-16 1987-11-25 Jeol Ltd 収束電子線回折装置
JPH0877957A (ja) * 1994-09-06 1996-03-22 Hitachi Ltd 荷電粒子投射装置
WO2013161473A1 (ja) * 2012-04-27 2013-10-31 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡
JP2013229267A (ja) * 2012-04-27 2013-11-07 Hitachi High-Technologies Corp 走査電子顕微鏡
CN104272426A (zh) * 2012-04-27 2015-01-07 株式会社日立高新技术 扫描电子显微镜
US9040911B2 (en) 2012-04-27 2015-05-26 Hitachi High-Technologies Corporation Scanning electron microscope

Also Published As

Publication number Publication date
JPH043620B2 (enrdf_load_stackoverflow) 1992-01-23

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