JPS61190129U - - Google Patents

Info

Publication number
JPS61190129U
JPS61190129U JP7421885U JP7421885U JPS61190129U JP S61190129 U JPS61190129 U JP S61190129U JP 7421885 U JP7421885 U JP 7421885U JP 7421885 U JP7421885 U JP 7421885U JP S61190129 U JPS61190129 U JP S61190129U
Authority
JP
Japan
Prior art keywords
furnace
diffusion
reaction tube
heater
furnace end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7421885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7421885U priority Critical patent/JPS61190129U/ja
Publication of JPS61190129U publication Critical patent/JPS61190129U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP7421885U 1985-05-21 1985-05-21 Pending JPS61190129U (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7421885U JPS61190129U (US20030199744A1-20031023-C00003.png) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7421885U JPS61190129U (US20030199744A1-20031023-C00003.png) 1985-05-21 1985-05-21

Publications (1)

Publication Number Publication Date
JPS61190129U true JPS61190129U (US20030199744A1-20031023-C00003.png) 1986-11-27

Family

ID=30614309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7421885U Pending JPS61190129U (US20030199744A1-20031023-C00003.png) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPS61190129U (US20030199744A1-20031023-C00003.png)

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