JPS61189637A - 露光装置 - Google Patents

露光装置

Info

Publication number
JPS61189637A
JPS61189637A JP60029458A JP2945885A JPS61189637A JP S61189637 A JPS61189637 A JP S61189637A JP 60029458 A JP60029458 A JP 60029458A JP 2945885 A JP2945885 A JP 2945885A JP S61189637 A JPS61189637 A JP S61189637A
Authority
JP
Japan
Prior art keywords
mask
temperature
cooling plate
cooling
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60029458A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521332B2 (cg-RX-API-DMAC10.html
Inventor
Masato Muraki
真人 村木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP60029458A priority Critical patent/JPS61189637A/ja
Publication of JPS61189637A publication Critical patent/JPS61189637A/ja
Publication of JPH0521332B2 publication Critical patent/JPH0521332B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP60029458A 1985-02-19 1985-02-19 露光装置 Granted JPS61189637A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60029458A JPS61189637A (ja) 1985-02-19 1985-02-19 露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60029458A JPS61189637A (ja) 1985-02-19 1985-02-19 露光装置

Publications (2)

Publication Number Publication Date
JPS61189637A true JPS61189637A (ja) 1986-08-23
JPH0521332B2 JPH0521332B2 (cg-RX-API-DMAC10.html) 1993-03-24

Family

ID=12276657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60029458A Granted JPS61189637A (ja) 1985-02-19 1985-02-19 露光装置

Country Status (1)

Country Link
JP (1) JPS61189637A (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312640A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
EP1064713A4 (en) * 1998-07-09 2005-07-20 Nikon Corp EXPOSURE DEVICE WITH PLANAR MOTOR
US6954258B2 (en) 2001-08-20 2005-10-11 Canon Kabushiki Kaisha Positioning apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6632292B1 (en) 1998-03-13 2003-10-14 Semitool, Inc. Selective treatment of microelectronic workpiece surfaces
US7264698B2 (en) 1999-04-13 2007-09-04 Semitool, Inc. Apparatus and methods for electrochemical processing of microelectronic workpieces
WO2002004887A1 (en) 2000-07-08 2002-01-17 Semitool, Inc. Methods and apparatus for processing microelectronic workpieces using metrology

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63312640A (ja) * 1987-06-15 1988-12-21 Canon Inc 露光装置
EP1064713A4 (en) * 1998-07-09 2005-07-20 Nikon Corp EXPOSURE DEVICE WITH PLANAR MOTOR
US6954258B2 (en) 2001-08-20 2005-10-11 Canon Kabushiki Kaisha Positioning apparatus

Also Published As

Publication number Publication date
JPH0521332B2 (cg-RX-API-DMAC10.html) 1993-03-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term