JPS6118962B2 - - Google Patents
Info
- Publication number
- JPS6118962B2 JPS6118962B2 JP12109378A JP12109378A JPS6118962B2 JP S6118962 B2 JPS6118962 B2 JP S6118962B2 JP 12109378 A JP12109378 A JP 12109378A JP 12109378 A JP12109378 A JP 12109378A JP S6118962 B2 JPS6118962 B2 JP S6118962B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- edge
- axis
- detection means
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 89
- 238000001514 detection method Methods 0.000 claims description 74
- 238000003384 imaging method Methods 0.000 claims description 15
- 230000001360 synchronised effect Effects 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 37
- 230000007246 mechanism Effects 0.000 description 33
- 238000010586 diagram Methods 0.000 description 17
- 238000005259 measurement Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000001052 transient effect Effects 0.000 description 2
- 108010076504 Protein Sorting Signals Proteins 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12109378A JPS5547407A (en) | 1978-09-30 | 1978-09-30 | Automatic measuring instrument for coordinates of edge line |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12109378A JPS5547407A (en) | 1978-09-30 | 1978-09-30 | Automatic measuring instrument for coordinates of edge line |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5547407A JPS5547407A (en) | 1980-04-03 |
| JPS6118962B2 true JPS6118962B2 (ko) | 1986-05-15 |
Family
ID=14802694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12109378A Granted JPS5547407A (en) | 1978-09-30 | 1978-09-30 | Automatic measuring instrument for coordinates of edge line |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547407A (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59162608U (ja) * | 1983-04-06 | 1984-10-31 | 橋本 宏 | 棒状材の曲げ測定装置 |
| JPH01199102A (ja) * | 1988-12-26 | 1989-08-10 | Hitachi Ltd | 立体形状検査装置 |
-
1978
- 1978-09-30 JP JP12109378A patent/JPS5547407A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5547407A (en) | 1980-04-03 |
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