JPS61186820A - 直熱型流量センサ - Google Patents
直熱型流量センサInfo
- Publication number
- JPS61186820A JPS61186820A JP60025233A JP2523385A JPS61186820A JP S61186820 A JPS61186820 A JP S61186820A JP 60025233 A JP60025233 A JP 60025233A JP 2523385 A JP2523385 A JP 2523385A JP S61186820 A JPS61186820 A JP S61186820A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resistor
- temperature
- heat
- uneven structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000005530 etching Methods 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 239000013078 crystal Substances 0.000 claims abstract description 9
- 239000012530 fluid Substances 0.000 claims 2
- 230000001419 dependent effect Effects 0.000 abstract description 12
- 238000001514 detection method Methods 0.000 abstract description 11
- 230000020169 heat generation Effects 0.000 abstract description 8
- 230000035945 sensitivity Effects 0.000 abstract description 8
- 238000007740 vapor deposition Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000000191 radiation effect Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 230000003187 abdominal effect Effects 0.000 description 27
- 230000007423 decrease Effects 0.000 description 9
- 239000012528 membrane Substances 0.000 description 8
- 238000002485 combustion reaction Methods 0.000 description 7
- 230000017525 heat dissipation Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000004043 responsiveness Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 210000000988 bone and bone Anatomy 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60025233A JPS61186820A (ja) | 1985-02-14 | 1985-02-14 | 直熱型流量センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60025233A JPS61186820A (ja) | 1985-02-14 | 1985-02-14 | 直熱型流量センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61186820A true JPS61186820A (ja) | 1986-08-20 |
| JPH0441765B2 JPH0441765B2 (enrdf_load_stackoverflow) | 1992-07-09 |
Family
ID=12160256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60025233A Granted JPS61186820A (ja) | 1985-02-14 | 1985-02-14 | 直熱型流量センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61186820A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19857549B4 (de) * | 1998-12-14 | 2009-12-24 | Robert Bosch Gmbh | Sensor mit einer Membran und Verfahren zur Herstellung des Sensors mit einer Membran |
| US12366474B1 (en) | 2024-03-19 | 2025-07-22 | Toflo Corporation | Thermal type flowmeter |
-
1985
- 1985-02-14 JP JP60025233A patent/JPS61186820A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19857549B4 (de) * | 1998-12-14 | 2009-12-24 | Robert Bosch Gmbh | Sensor mit einer Membran und Verfahren zur Herstellung des Sensors mit einer Membran |
| US12366474B1 (en) | 2024-03-19 | 2025-07-22 | Toflo Corporation | Thermal type flowmeter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0441765B2 (enrdf_load_stackoverflow) | 1992-07-09 |
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