JPS61186235U - - Google Patents
Info
- Publication number
- JPS61186235U JPS61186235U JP6919485U JP6919485U JPS61186235U JP S61186235 U JPS61186235 U JP S61186235U JP 6919485 U JP6919485 U JP 6919485U JP 6919485 U JP6919485 U JP 6919485U JP S61186235 U JPS61186235 U JP S61186235U
- Authority
- JP
- Japan
- Prior art keywords
- section
- stage
- collect
- wafer
- mount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 6
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6919485U JPS61186235U (enExample) | 1985-05-10 | 1985-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6919485U JPS61186235U (enExample) | 1985-05-10 | 1985-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61186235U true JPS61186235U (enExample) | 1986-11-20 |
Family
ID=30604636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6919485U Pending JPS61186235U (enExample) | 1985-05-10 | 1985-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61186235U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128757A (ja) * | 1974-09-04 | 1976-03-11 | Hitachi Ltd | Peretsutobondeingusochi |
| JPS59210647A (ja) * | 1983-05-14 | 1984-11-29 | Matsushita Electric Ind Co Ltd | ペレツトボンデイング装置 |
-
1985
- 1985-05-10 JP JP6919485U patent/JPS61186235U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5128757A (ja) * | 1974-09-04 | 1976-03-11 | Hitachi Ltd | Peretsutobondeingusochi |
| JPS59210647A (ja) * | 1983-05-14 | 1984-11-29 | Matsushita Electric Ind Co Ltd | ペレツトボンデイング装置 |