JPS6118338B2 - - Google Patents
Info
- Publication number
- JPS6118338B2 JPS6118338B2 JP15259080A JP15259080A JPS6118338B2 JP S6118338 B2 JPS6118338 B2 JP S6118338B2 JP 15259080 A JP15259080 A JP 15259080A JP 15259080 A JP15259080 A JP 15259080A JP S6118338 B2 JPS6118338 B2 JP S6118338B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- temperature
- integrated circuit
- semiconductor wafer
- probe card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 26
- 238000001816 cooling Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000009529 body temperature measurement Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15259080A JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15259080A JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5776852A JPS5776852A (en) | 1982-05-14 |
| JPS6118338B2 true JPS6118338B2 (enrdf_load_stackoverflow) | 1986-05-12 |
Family
ID=15543765
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15259080A Granted JPS5776852A (en) | 1980-10-30 | 1980-10-30 | Card for probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5776852A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62154636A (ja) * | 1985-12-27 | 1987-07-09 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ薄膜形成装置 |
| JP5008877B2 (ja) * | 2006-02-21 | 2012-08-22 | 株式会社リコー | Ｉｃテスト方法 |
-
1980
- 1980-10-30 JP JP15259080A patent/JPS5776852A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5776852A (en) | 1982-05-14 |