JPS61182752A - 研摩皿 - Google Patents

研摩皿

Info

Publication number
JPS61182752A
JPS61182752A JP2084185A JP2084185A JPS61182752A JP S61182752 A JPS61182752 A JP S61182752A JP 2084185 A JP2084185 A JP 2084185A JP 2084185 A JP2084185 A JP 2084185A JP S61182752 A JPS61182752 A JP S61182752A
Authority
JP
Japan
Prior art keywords
polishing
polished
polishing plate
curvature
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2084185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314588B2 (enExample
Inventor
Nobuo Nakamura
宣夫 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2084185A priority Critical patent/JPS61182752A/ja
Publication of JPS61182752A publication Critical patent/JPS61182752A/ja
Publication of JPH0314588B2 publication Critical patent/JPH0314588B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP2084185A 1985-02-07 1985-02-07 研摩皿 Granted JPS61182752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2084185A JPS61182752A (ja) 1985-02-07 1985-02-07 研摩皿

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2084185A JPS61182752A (ja) 1985-02-07 1985-02-07 研摩皿

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2275442A Division JPH0637027B2 (ja) 1990-10-16 1990-10-16 研摩方法

Publications (2)

Publication Number Publication Date
JPS61182752A true JPS61182752A (ja) 1986-08-15
JPH0314588B2 JPH0314588B2 (enExample) 1991-02-27

Family

ID=12038295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2084185A Granted JPS61182752A (ja) 1985-02-07 1985-02-07 研摩皿

Country Status (1)

Country Link
JP (1) JPS61182752A (enExample)

Also Published As

Publication number Publication date
JPH0314588B2 (enExample) 1991-02-27

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