JPS61180128A - 物体表面検査装置 - Google Patents

物体表面検査装置

Info

Publication number
JPS61180128A
JPS61180128A JP200186A JP200186A JPS61180128A JP S61180128 A JPS61180128 A JP S61180128A JP 200186 A JP200186 A JP 200186A JP 200186 A JP200186 A JP 200186A JP S61180128 A JPS61180128 A JP S61180128A
Authority
JP
Japan
Prior art keywords
light
reflected
foreign object
foreign
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP200186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0141922B2 (enExample
Inventor
Masakuni Akiba
秋葉　政邦
Hiroto Nagatomo
長友　宏人
Jun Suzuki
純 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP200186A priority Critical patent/JPS61180128A/ja
Publication of JPS61180128A publication Critical patent/JPS61180128A/ja
Publication of JPH0141922B2 publication Critical patent/JPH0141922B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP200186A 1986-01-10 1986-01-10 物体表面検査装置 Granted JPS61180128A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP200186A JPS61180128A (ja) 1986-01-10 1986-01-10 物体表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP200186A JPS61180128A (ja) 1986-01-10 1986-01-10 物体表面検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP135679A Division JPS5594145A (en) 1978-01-27 1979-01-12 Method of and device for inspecting surface of article

Publications (2)

Publication Number Publication Date
JPS61180128A true JPS61180128A (ja) 1986-08-12
JPH0141922B2 JPH0141922B2 (enExample) 1989-09-08

Family

ID=11517184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP200186A Granted JPS61180128A (ja) 1986-01-10 1986-01-10 物体表面検査装置

Country Status (1)

Country Link
JP (1) JPS61180128A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
WO2008053742A1 (en) * 2006-11-02 2008-05-08 Bridgestone Corporation Method and device for inspecting tire surface
JP2014052217A (ja) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd 異物検査装置、異物検査方法
CN105222728A (zh) * 2015-09-14 2016-01-06 深圳市星源材质科技股份有限公司 一种锂电池隔膜表面平整度的检测装置及其方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999086A (enExample) * 1973-01-26 1974-09-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999086A (enExample) * 1973-01-26 1974-09-19

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device
WO2008053742A1 (en) * 2006-11-02 2008-05-08 Bridgestone Corporation Method and device for inspecting tire surface
JP2008116270A (ja) * 2006-11-02 2008-05-22 Bridgestone Corp タイヤの表面検査方法および装置
US8059279B2 (en) 2006-11-02 2011-11-15 Bridgestone Corporation Method and system for inspecting tire surface
JP2014052217A (ja) * 2012-09-05 2014-03-20 Dainippon Printing Co Ltd 異物検査装置、異物検査方法
CN105222728A (zh) * 2015-09-14 2016-01-06 深圳市星源材质科技股份有限公司 一种锂电池隔膜表面平整度的检测装置及其方法

Also Published As

Publication number Publication date
JPH0141922B2 (enExample) 1989-09-08

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