JPS61176807A - 回路パターン検査装置 - Google Patents

回路パターン検査装置

Info

Publication number
JPS61176807A
JPS61176807A JP60016539A JP1653985A JPS61176807A JP S61176807 A JPS61176807 A JP S61176807A JP 60016539 A JP60016539 A JP 60016539A JP 1653985 A JP1653985 A JP 1653985A JP S61176807 A JPS61176807 A JP S61176807A
Authority
JP
Japan
Prior art keywords
pattern
partial image
inspected
defect
cut out
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60016539A
Other languages
English (en)
Japanese (ja)
Other versions
JPH058762B2 (enrdf_load_stackoverflow
Inventor
Yukio Matsuyama
松山　幸雄
Keiichi Okamoto
啓一 岡本
Mitsuzo Nakahata
仲畑　光蔵
Shunji Maeda
俊二 前田
Hisafumi Iwata
岩田　尚史
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60016539A priority Critical patent/JPS61176807A/ja
Publication of JPS61176807A publication Critical patent/JPS61176807A/ja
Publication of JPH058762B2 publication Critical patent/JPH058762B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP60016539A 1985-02-01 1985-02-01 回路パターン検査装置 Granted JPS61176807A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60016539A JPS61176807A (ja) 1985-02-01 1985-02-01 回路パターン検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60016539A JPS61176807A (ja) 1985-02-01 1985-02-01 回路パターン検査装置

Publications (2)

Publication Number Publication Date
JPS61176807A true JPS61176807A (ja) 1986-08-08
JPH058762B2 JPH058762B2 (enrdf_load_stackoverflow) 1993-02-03

Family

ID=11919068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60016539A Granted JPS61176807A (ja) 1985-02-01 1985-02-01 回路パターン検査装置

Country Status (1)

Country Link
JP (1) JPS61176807A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167980A (ja) * 1986-12-30 1988-07-12 Narumi China Corp プリント配線パタ−ン等の欠陥検査方法およびその装置
JPH02236406A (ja) * 1989-03-10 1990-09-19 Fujitsu Ltd マスクパターン検査方法
JPH03167407A (ja) * 1989-11-28 1991-07-19 Kao Corp 表示図柄のずれ検査装置
US7844916B2 (en) 2004-12-03 2010-11-30 Sony Computer Entertainment Inc. Multimedia reproducing apparatus and menu screen display method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59157505A (ja) * 1983-02-28 1984-09-06 Hitachi Ltd パタ−ン検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63167980A (ja) * 1986-12-30 1988-07-12 Narumi China Corp プリント配線パタ−ン等の欠陥検査方法およびその装置
JPH02236406A (ja) * 1989-03-10 1990-09-19 Fujitsu Ltd マスクパターン検査方法
JPH03167407A (ja) * 1989-11-28 1991-07-19 Kao Corp 表示図柄のずれ検査装置
US7844916B2 (en) 2004-12-03 2010-11-30 Sony Computer Entertainment Inc. Multimedia reproducing apparatus and menu screen display method

Also Published As

Publication number Publication date
JPH058762B2 (enrdf_load_stackoverflow) 1993-02-03

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