JPS61175506A - 光電式測定機器における受光センサ−構造 - Google Patents

光電式測定機器における受光センサ−構造

Info

Publication number
JPS61175506A
JPS61175506A JP1577885A JP1577885A JPS61175506A JP S61175506 A JPS61175506 A JP S61175506A JP 1577885 A JP1577885 A JP 1577885A JP 1577885 A JP1577885 A JP 1577885A JP S61175506 A JPS61175506 A JP S61175506A
Authority
JP
Japan
Prior art keywords
light
light receiving
receiving element
dead zone
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1577885A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0346042B2 (enrdf_load_stackoverflow
Inventor
Sadamitsu Nishihara
西原 貞光
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP1577885A priority Critical patent/JPS61175506A/ja
Publication of JPS61175506A publication Critical patent/JPS61175506A/ja
Publication of JPH0346042B2 publication Critical patent/JPH0346042B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP1577885A 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造 Granted JPS61175506A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1577885A JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1577885A JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Publications (2)

Publication Number Publication Date
JPS61175506A true JPS61175506A (ja) 1986-08-07
JPH0346042B2 JPH0346042B2 (enrdf_load_stackoverflow) 1991-07-15

Family

ID=11898269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1577885A Granted JPS61175506A (ja) 1985-01-30 1985-01-30 光電式測定機器における受光センサ−構造

Country Status (1)

Country Link
JP (1) JPS61175506A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0346042B2 (enrdf_load_stackoverflow) 1991-07-15

Similar Documents

Publication Publication Date Title
US4652765A (en) Edge detecting device in optical measuring instrument
JPS5852514A (ja) 光源−観測面間距離測定装置
US4652738A (en) Edge detecting device in optical measuring instrument
US4436418A (en) Distance detector device
JPS61175506A (ja) 光電式測定機器における受光センサ−構造
JPS6244201B2 (enrdf_load_stackoverflow)
JPH0321841B2 (enrdf_load_stackoverflow)
JPS61213609A (ja) 光電式測定機器におけるエツジ検出装置
JPS61120905A (ja) 光学式測定機器におけるエツジ検出装置
JPH0378561B2 (enrdf_load_stackoverflow)
JPH0419481B2 (enrdf_load_stackoverflow)
JPH0733963B2 (ja) 拡大投影機
JPS61118606A (ja) 光学式寸法測定機
JPH0419482B2 (enrdf_load_stackoverflow)
JPH02176419A (ja) 光学式エンコーダ
JPS61122505A (ja) 光学式測定機器におけるエツジ検出装置
JPS5972007A (ja) 対称物体の中心位置検出装置
JPH0419483B2 (enrdf_load_stackoverflow)
JPS6324112A (ja) 投影画像のエツジ検出装置
JPS63131011A (ja) 光学式エツジ検出装置
JPS58168904A (ja) 位置変位検出装置
JPH03148971A (ja) 投影パターンを用いた非接触変位計測方法
JPH0212008A (ja) 非接触変位測定装置
JPH07253306A (ja) 端面検出装置
JPS6342441A (ja) 凹面鏡の精度測定装置

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees