JPS6117488A - 化合物半導体単結晶の製造方法 - Google Patents

化合物半導体単結晶の製造方法

Info

Publication number
JPS6117488A
JPS6117488A JP13772784A JP13772784A JPS6117488A JP S6117488 A JPS6117488 A JP S6117488A JP 13772784 A JP13772784 A JP 13772784A JP 13772784 A JP13772784 A JP 13772784A JP S6117488 A JPS6117488 A JP S6117488A
Authority
JP
Japan
Prior art keywords
reaction vessel
single crystal
semi
compound semiconductor
cooling body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13772784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0321513B2 (enrdf_load_stackoverflow
Inventor
Yasuharu Muto
康晴 武藤
Hiroyuki Hoshino
弘之 星野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP13772784A priority Critical patent/JPS6117488A/ja
Publication of JPS6117488A publication Critical patent/JPS6117488A/ja
Publication of JPH0321513B2 publication Critical patent/JPH0321513B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/003Heating or cooling of the melt or the crystallised material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13772784A 1984-07-03 1984-07-03 化合物半導体単結晶の製造方法 Granted JPS6117488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13772784A JPS6117488A (ja) 1984-07-03 1984-07-03 化合物半導体単結晶の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13772784A JPS6117488A (ja) 1984-07-03 1984-07-03 化合物半導体単結晶の製造方法

Publications (2)

Publication Number Publication Date
JPS6117488A true JPS6117488A (ja) 1986-01-25
JPH0321513B2 JPH0321513B2 (enrdf_load_stackoverflow) 1991-03-22

Family

ID=15205413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13772784A Granted JPS6117488A (ja) 1984-07-03 1984-07-03 化合物半導体単結晶の製造方法

Country Status (1)

Country Link
JP (1) JPS6117488A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632272A (en) * 1979-08-22 1981-04-01 Nat Marine Plastic Transporting bag
JPS59217692A (ja) * 1983-05-25 1984-12-07 Rikagaku Kenkyusho 薄膜単結晶の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632272A (en) * 1979-08-22 1981-04-01 Nat Marine Plastic Transporting bag
JPS59217692A (ja) * 1983-05-25 1984-12-07 Rikagaku Kenkyusho 薄膜単結晶の製造方法

Also Published As

Publication number Publication date
JPH0321513B2 (enrdf_load_stackoverflow) 1991-03-22

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