JPS61172106A - Production of optical waveguide - Google Patents

Production of optical waveguide

Info

Publication number
JPS61172106A
JPS61172106A JP1289485A JP1289485A JPS61172106A JP S61172106 A JPS61172106 A JP S61172106A JP 1289485 A JP1289485 A JP 1289485A JP 1289485 A JP1289485 A JP 1289485A JP S61172106 A JPS61172106 A JP S61172106A
Authority
JP
Japan
Prior art keywords
photosensitive resin
optical waveguide
core layer
core
sectional shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1289485A
Other languages
Japanese (ja)
Inventor
Hiroo Inoue
博夫 井上
Kohei Kodera
小寺 孝兵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP1289485A priority Critical patent/JPS61172106A/en
Publication of JPS61172106A publication Critical patent/JPS61172106A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13Integrated optical circuits characterised by the manufacturing method

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To form an optical waveguide with a less joint loss to an optical fiber by pattern-exposing and sensitizing a photosensitive resin so as to form a curing agent which has a rectangular sectional shape and becomes the core of the core layer of the optical waveguide, coating a homogeneous photosensitive resin and executing exposing and sensitizing steps with respect to all sides. CONSTITUTION:A transparent film 7 is put on a glass substrate 6, and thereon a spacer 8 is placed and filled with the photosensitive resin 9, on which a transparent film 10 is put as a cover to interrupt air. On the film 10 a mask 11 is placed in a desired shape, and the pattern exposure is executed by an incident light beam 12. No-exposed part is removed by etching. The sectional shape of the curing agent 5 for becoming the core of the core layer obtained in such a way is rectangular. The homogeneous photosensitive resin is dropped and coated on a side surface 5a in the axial direction of the curing agent 5, exposed in this state and cured, thereby obtaining the peripheral part 13 of the core layer. Said steps are applied to other three sides 5b, 5c and 5d to form the peripheral parts 14, 15 and 16 of the core layer.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は感光性樹脂を用いた光導波路のfit製方決方
法する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a method for manufacturing an optical waveguide using a photosensitive resin.

〔背景技術〕[Background technology]

従来、感光性樹脂を用いた光導波路を作製する場合、第
1図に示す様なものが作られている。
Conventionally, when producing an optical waveguide using a photosensitive resin, one as shown in FIG. 1 has been produced.

まず基板1にクツラド層2をコーティングし、その上に
所望の形状のマスクパターンで感光させた樹脂(コア層
)3を載せ、その表面をさらにクラ、ド層で被い光導波
路とし、それを埋め込み用樹脂4等で埋め込んでブロッ
ク化している。上記コーア層3は、従来第2図の様にし
て感光させた後、工、チング(洗浄)して形成されてい
たので、光導波路の光軸に対して垂直な断面の形状は矩
形になっていた。この様にして作製される光導波路で光
グパイスを作製し、光ファイバとの接続を考えた場合、
断面形状の違いによる接続ロスが大きくなり、光ファイ
バの伝送距離の縮小等が、欠点となっていた。
First, a substrate 1 is coated with a cuturad layer 2, a resin (core layer) 3 exposed to light with a mask pattern of a desired shape is placed on top of the substrate 1, and the surface thereof is further covered with layers of cladding and cladding to form an optical waveguide. It is made into a block by embedding it with embedding resin 4 or the like. The core layer 3 was conventionally formed by exposing it to light as shown in Fig. 2 and then processing and cleaning it, so the cross section perpendicular to the optical axis of the optical waveguide had a rectangular shape. was. When creating an optical waveguide using the optical waveguide created in this way and considering connecting it to an optical fiber,
Disadvantages include an increase in connection loss due to differences in cross-sectional shapes and a reduction in the transmission distance of the optical fiber.

〔発明の目的〕[Purpose of the invention]

本発明は上記の点を改善するために成したものであって
、その目的とするところは、断面形状の違いによるため
に生ずる光ファイバとの結合ロスの少ない光導波路の作
製方法を提供することにある。
The present invention has been made to improve the above points, and its purpose is to provide a method for manufacturing an optical waveguide with less coupling loss with an optical fiber caused by differences in cross-sectional shape. It is in.

〔発明の開示〕[Disclosure of the invention]

以下本発明を実施例として掲げた図面に基づき説明する
。まず第2図のようにして、コア層の核となるべき硬化
物6を作製する。ガラス基板6の上に透明なフィルム7
をひき、上記フィルム7上にスペーサ8(中抜きの枠)
を置いて、その中に感光性樹脂9を充てんする。上記感
光性樹脂9上に透明フィルムlOをカバーとしてかけ、
空気を速断する。上記フィルム1G上に所望形状のマス
クUをのせ、照射光四によりパターン露光する。未露光
部はエツチング(洗浄)によ抄除去する。このようVこ
して得られたコア層の核となるべき硬化物5の断面形状
は矩形をしていてマスクUのパターン幅りとスペーサ8
の厚みtKより、また露光条件によつて変化する。従っ
て、上記パターン幅り。
The present invention will be explained below based on the drawings shown as examples. First, as shown in FIG. 2, a cured product 6 that is to become the nucleus of the core layer is prepared. Transparent film 7 on glass substrate 6
, and place spacer 8 (hollow frame) on top of the film 7.
and fill it with photosensitive resin 9. A transparent film IO is placed on the photosensitive resin 9 as a cover,
Cut the air quickly. A mask U having a desired shape is placed on the film 1G, and pattern exposure is performed using irradiation light 4. The unexposed areas are removed by etching (cleaning). The cross-sectional shape of the cured product 5, which is to become the nucleus of the core layer obtained by V-filtering, is rectangular, and the pattern width of the mask U and the spacer 8
It changes depending on the thickness tK and the exposure conditions. Therefore, the width of the above pattern.

厚み砿、露光条件を選択するととくより、上記断面形状
を矩形から正方形にすることができる。更に、上記正方
形の大きさは使用接続する光ファイバのコアの断面の円
形に内接する正方形とする。
By selecting the thickness and exposure conditions, the cross-sectional shape can be changed from rectangular to square. Further, the size of the square is a square inscribed in the circular cross section of the core of the optical fiber to be used and connected.

次に、第3図に示すように、上記コア層の核となるべき
硬化物5の軸方向の側面5aに、上記硬化物5と同質の
感光性樹脂を滴下・塗布する。上記樹脂は表面張力によ
り、上記硬化物5の側面5a上で、硬化物5に外接する
円5′との間を埋める。
Next, as shown in FIG. 3, a photosensitive resin of the same quality as the cured product 5 is dropped and coated on the axial side surface 5a of the cured product 5, which is to become the core of the core layer. Due to surface tension, the resin fills the gap between the side surface 5a of the cured product 5 and the circle 5' circumscribing the cured product 5.

この伏動で露光し、樹脂を硬化させ、コア層の周辺部口
とする。上記行程を他の3辺5b 、 5c 、5dに
ついても行ない、コア層の周辺部14 、15 、16
を形成する。
The resin is exposed to light during this downward motion to harden it, forming a peripheral portion of the core layer. The above process is also performed for the other three sides 5b, 5c, 5d, and the peripheral parts 14, 15, 16 of the core layer are
form.

このようKして、断面形状が略円形のコア層17が得ら
れる。上記円形のコア層17は、従来通抄、クツラド層
形成を行ない、ブロック化することにより、光ファイバ
との断面形状の違いによる結合ロスの少ない光導波路が
得られる。
In this manner, a core layer 17 having a substantially circular cross-sectional shape is obtained. The circular core layer 17 is formed into blocks by conventional paper cutting and Cuturad layer formation, whereby an optical waveguide with less coupling loss due to the difference in cross-sectional shape with the optical fiber can be obtained.

なお、上記コア層υの断面形状ができるだけ円形に近づ
くように1樹脂の粘度を、材料自身の調合や露光雰囲気
の塩度を変えるととくより調整する。
The viscosity of the resin is adjusted by changing the formulation of the material itself and the salinity of the exposure atmosphere so that the cross-sectional shape of the core layer υ approaches a circle as much as possible.

〔発明の効果〕〔Effect of the invention〕

上記のように本発明によれば、感光性樹脂を用い走光導
波路の作製方法において、感光性樹脂をパターン露光、
感光するととくより、断面形状が矩形状で、光導波路の
コア層の核となる硬化物を形成し、上記硬化物の軸方向
の側面に、上記感光性樹脂と同質の感光性樹脂を塗布し
、露光、感光させ、上記行程を、上記硬化物の長さ方向
の全側面について行なうことにより、断面形状が略円形
の光導波路が得られるので、断面形状の違いKよるため
に生ずる光ファイバとの結合ロスの少ない先導波路の作
製方法が提供できた。
As described above, according to the present invention, in the method for manufacturing a light traveling waveguide using a photosensitive resin, the photosensitive resin is subjected to pattern exposure,
When exposed to light, a cured product having a rectangular cross-sectional shape and serving as the core of the core layer of the optical waveguide is formed, and a photosensitive resin of the same quality as the photosensitive resin is applied to the axial side surface of the cured product. By exposing and sensitizing the above-mentioned process to all sides in the length direction of the cured product, an optical waveguide with a substantially circular cross-sectional shape can be obtained. We were able to provide a method for fabricating a leading waveguide with low coupling loss.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の光導波路の斜視図、第2図は本発明の一
実施例に係る光導波路のコア層の核となる硬化物の作製
方法を示す断面図、第3図は本発明の一実施例に係るコ
ア層の周辺部の作製方法を示す断面図である。 5・・・硬化物、9・・・扇光性樹脂、13 、14 
、15 、16・・・コア層の周辺部。
FIG. 1 is a perspective view of a conventional optical waveguide, FIG. 2 is a cross-sectional view showing a method for producing a cured material that is the core of the core layer of an optical waveguide according to an embodiment of the present invention, and FIG. 3 is a perspective view of a conventional optical waveguide. FIG. 3 is a cross-sectional view showing a method for manufacturing a peripheral portion of a core layer according to an example. 5... Cured product, 9... Fan-lighting resin, 13, 14
, 15, 16...periphery of the core layer.

Claims (1)

【特許請求の範囲】[Claims] (1)感光性樹脂を用いた光導波路の作製方法において
、感光性樹脂をパターン露光、感光により断面形状が矩
形状で、光導波路のコア層の核となる硬化物を形成し、
上記硬化物の軸方向の側面に上記感光性樹脂と同質の感
光性樹脂を塗布し、露光、感光させ、上記行程を上記硬
化物の長さ方向の全側面について行ない、断面形状が略
円形になるようにしたことを特徴とする光導波路の作製
方法。
(1) In a method for producing an optical waveguide using a photosensitive resin, the photosensitive resin is pattern-exposed and exposed to light to form a cured product having a rectangular cross-sectional shape and serving as the core of the core layer of the optical waveguide;
A photosensitive resin of the same quality as the above photosensitive resin is applied to the axial side surface of the cured product, exposed and exposed, and the above process is carried out on all sides of the cured product in the length direction, so that the cross-sectional shape becomes approximately circular. 1. A method for manufacturing an optical waveguide, characterized in that:
JP1289485A 1985-01-25 1985-01-25 Production of optical waveguide Pending JPS61172106A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1289485A JPS61172106A (en) 1985-01-25 1985-01-25 Production of optical waveguide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1289485A JPS61172106A (en) 1985-01-25 1985-01-25 Production of optical waveguide

Publications (1)

Publication Number Publication Date
JPS61172106A true JPS61172106A (en) 1986-08-02

Family

ID=11818096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1289485A Pending JPS61172106A (en) 1985-01-25 1985-01-25 Production of optical waveguide

Country Status (1)

Country Link
JP (1) JPS61172106A (en)

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