JPS6117142B2 - - Google Patents

Info

Publication number
JPS6117142B2
JPS6117142B2 JP55144908A JP14490880A JPS6117142B2 JP S6117142 B2 JPS6117142 B2 JP S6117142B2 JP 55144908 A JP55144908 A JP 55144908A JP 14490880 A JP14490880 A JP 14490880A JP S6117142 B2 JPS6117142 B2 JP S6117142B2
Authority
JP
Japan
Prior art keywords
time
probe card
probe
printed board
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55144908A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5768047A (en
Inventor
Jiro Suma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP55144908A priority Critical patent/JPS5768047A/ja
Publication of JPS5768047A publication Critical patent/JPS5768047A/ja
Publication of JPS6117142B2 publication Critical patent/JPS6117142B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55144908A 1980-10-16 1980-10-16 Probe card Granted JPS5768047A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55144908A JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55144908A JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Publications (2)

Publication Number Publication Date
JPS5768047A JPS5768047A (en) 1982-04-26
JPS6117142B2 true JPS6117142B2 (enExample) 1986-05-06

Family

ID=15373077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55144908A Granted JPS5768047A (en) 1980-10-16 1980-10-16 Probe card

Country Status (1)

Country Link
JP (1) JPS5768047A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196435U (enExample) * 1987-06-04 1988-12-16

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4812025B2 (ja) * 2006-08-11 2011-11-09 セイコーインスツル株式会社 面光源付プローブカード

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63196435U (enExample) * 1987-06-04 1988-12-16

Also Published As

Publication number Publication date
JPS5768047A (en) 1982-04-26

Similar Documents

Publication Publication Date Title
US5764655A (en) Built in self test with memory
KR940008039A (ko) 반도체테스트장치, 반도체테스트회로칩 및 프로브카드
JPH0342503B2 (enExample)
JPS5488084A (en) Test method of semiconductor device
JPS6117142B2 (enExample)
JP2737774B2 (ja) ウェハテスタ
JPS62141699A (ja) 半導体メモリ装置の検査方法
DK0705439T3 (da) Testindretning og fremgangsmåde for et integreret kredsløb fastloddet på et kredsløbskort
JPS588079B2 (ja) ハンドウタイメモリ
JP3084857B2 (ja) 電力用半導体装置の熱抵抗測定方法
TWI735915B (zh) 與面向受測裝置側之光源整合的晶圓探針卡及製造方法
JPH04115545A (ja) プローブカード
JPS57159051A (en) Semiconductor device
JPH04322441A (ja) 半導体集積回路装置、その検査方法及びそれに使用する検査装置
JPS5998389A (ja) 半導体メモリ
KR0156146B1 (ko) 프로브 테스트장치
KR100290440B1 (ko) 프로브 카드의 가변 소자 장착 구조
JPS6236282Y2 (enExample)
JPH08162508A (ja) シリコン・テスタの測定装置
JPS62283641A (ja) 半導体集積回路装置
Hiatt Microprobing
JPS5998388A (ja) 半導体メモリ
JP2919312B2 (ja) 半導体装置の検査方法
JPS63880B2 (enExample)
JPH0736415B2 (ja) ウエハテスト装置