JPS61170698A - イオン注入装置用冷却装置 - Google Patents
イオン注入装置用冷却装置Info
- Publication number
- JPS61170698A JPS61170698A JP1190185A JP1190185A JPS61170698A JP S61170698 A JPS61170698 A JP S61170698A JP 1190185 A JP1190185 A JP 1190185A JP 1190185 A JP1190185 A JP 1190185A JP S61170698 A JPS61170698 A JP S61170698A
- Authority
- JP
- Japan
- Prior art keywords
- coolant
- inner cylinder
- cylinder
- pipe
- outer cylinder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 title claims description 31
- 238000005468 ion implantation Methods 0.000 title claims description 9
- 239000002826 coolant Substances 0.000 claims description 89
- 150000002500 ions Chemical class 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 description 5
- 239000011810 insulating material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010795 gaseous waste Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 230000003100 immobilizing effect Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- DNNSSWSSYDEUBZ-OUBTZVSYSA-N krypton-85 Chemical compound [85Kr] DNNSSWSSYDEUBZ-OUBTZVSYSA-N 0.000 description 1
- 239000003758 nuclear fuel Substances 0.000 description 1
- 230000002285 radioactive effect Effects 0.000 description 1
- 238000012958 reprocessing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190185A JPS61170698A (ja) | 1985-01-25 | 1985-01-25 | イオン注入装置用冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190185A JPS61170698A (ja) | 1985-01-25 | 1985-01-25 | イオン注入装置用冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61170698A true JPS61170698A (ja) | 1986-08-01 |
| JPH0552913B2 JPH0552913B2 (enrdf_load_stackoverflow) | 1993-08-06 |
Family
ID=11790631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190185A Granted JPS61170698A (ja) | 1985-01-25 | 1985-01-25 | イオン注入装置用冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61170698A (enrdf_load_stackoverflow) |
-
1985
- 1985-01-25 JP JP1190185A patent/JPS61170698A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0552913B2 (enrdf_load_stackoverflow) | 1993-08-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |