JPH0552913B2 - - Google Patents

Info

Publication number
JPH0552913B2
JPH0552913B2 JP1190185A JP1190185A JPH0552913B2 JP H0552913 B2 JPH0552913 B2 JP H0552913B2 JP 1190185 A JP1190185 A JP 1190185A JP 1190185 A JP1190185 A JP 1190185A JP H0552913 B2 JPH0552913 B2 JP H0552913B2
Authority
JP
Japan
Prior art keywords
coolant
inner cylinder
cylinder
outer cylinder
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1190185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61170698A (ja
Inventor
Akira Kuwako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP1190185A priority Critical patent/JPS61170698A/ja
Publication of JPS61170698A publication Critical patent/JPS61170698A/ja
Publication of JPH0552913B2 publication Critical patent/JPH0552913B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1190185A 1985-01-25 1985-01-25 イオン注入装置用冷却装置 Granted JPS61170698A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1190185A JPS61170698A (ja) 1985-01-25 1985-01-25 イオン注入装置用冷却装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1190185A JPS61170698A (ja) 1985-01-25 1985-01-25 イオン注入装置用冷却装置

Publications (2)

Publication Number Publication Date
JPS61170698A JPS61170698A (ja) 1986-08-01
JPH0552913B2 true JPH0552913B2 (enrdf_load_stackoverflow) 1993-08-06

Family

ID=11790631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1190185A Granted JPS61170698A (ja) 1985-01-25 1985-01-25 イオン注入装置用冷却装置

Country Status (1)

Country Link
JP (1) JPS61170698A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS61170698A (ja) 1986-08-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees