JPS61163261A - 真空蒸着法 - Google Patents

真空蒸着法

Info

Publication number
JPS61163261A
JPS61163261A JP60005187A JP518785A JPS61163261A JP S61163261 A JPS61163261 A JP S61163261A JP 60005187 A JP60005187 A JP 60005187A JP 518785 A JP518785 A JP 518785A JP S61163261 A JPS61163261 A JP S61163261A
Authority
JP
Japan
Prior art keywords
substrate
vapor deposition
mask
powder
montmorillonite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60005187A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331787B2 (enExample
Inventor
Masao Osumi
大住　昌郎
Eiji Ando
安藤　英二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60005187A priority Critical patent/JPS61163261A/ja
Publication of JPS61163261A publication Critical patent/JPS61163261A/ja
Publication of JPH0331787B2 publication Critical patent/JPH0331787B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP60005187A 1985-01-16 1985-01-16 真空蒸着法 Granted JPS61163261A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60005187A JPS61163261A (ja) 1985-01-16 1985-01-16 真空蒸着法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60005187A JPS61163261A (ja) 1985-01-16 1985-01-16 真空蒸着法

Publications (2)

Publication Number Publication Date
JPS61163261A true JPS61163261A (ja) 1986-07-23
JPH0331787B2 JPH0331787B2 (enExample) 1991-05-08

Family

ID=11604220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60005187A Granted JPS61163261A (ja) 1985-01-16 1985-01-16 真空蒸着法

Country Status (1)

Country Link
JP (1) JPS61163261A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102978566A (zh) * 2012-12-14 2013-03-20 西北有色金属研究院 一种制备真空物理气相沉积镀层图案的方法
US8838009B2 (en) 2007-02-19 2014-09-16 Konica Minolta, Inc. Roller mechanism with support member and image forming apparatus having the roller

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8838009B2 (en) 2007-02-19 2014-09-16 Konica Minolta, Inc. Roller mechanism with support member and image forming apparatus having the roller
CN102978566A (zh) * 2012-12-14 2013-03-20 西北有色金属研究院 一种制备真空物理气相沉积镀层图案的方法

Also Published As

Publication number Publication date
JPH0331787B2 (enExample) 1991-05-08

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees