JPS61161712A - 半導体製造装置 - Google Patents
半導体製造装置Info
- Publication number
- JPS61161712A JPS61161712A JP292885A JP292885A JPS61161712A JP S61161712 A JPS61161712 A JP S61161712A JP 292885 A JP292885 A JP 292885A JP 292885 A JP292885 A JP 292885A JP S61161712 A JPS61161712 A JP S61161712A
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- semiconductor manufacturing
- heating furnace
- holding
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP292885A JPS61161712A (ja) | 1985-01-11 | 1985-01-11 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP292885A JPS61161712A (ja) | 1985-01-11 | 1985-01-11 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61161712A true JPS61161712A (ja) | 1986-07-22 |
| JPH0311088B2 JPH0311088B2 (enrdf_load_stackoverflow) | 1991-02-15 |
Family
ID=11543000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP292885A Granted JPS61161712A (ja) | 1985-01-11 | 1985-01-11 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61161712A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01280312A (ja) * | 1987-09-29 | 1989-11-10 | Tel Sagami Ltd | 熱処理装置 |
-
1985
- 1985-01-11 JP JP292885A patent/JPS61161712A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01280312A (ja) * | 1987-09-29 | 1989-11-10 | Tel Sagami Ltd | 熱処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0311088B2 (enrdf_load_stackoverflow) | 1991-02-15 |
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