JPS6116007A - Production of vertical magnetic recording head - Google Patents

Abstract

PURPOSE:To produces simultaneously both a main magnetic pole and a magnetic film which connects the main magnetic pole and a magnetic matter part through a single process, by forming a recess notch part to the end face of one of both nonmagnetic substrates which are set with their end faces put close to each other and providing a magnetic thin film to said notch part. CONSTITUTION:A notch part 8 for formation of a main magnetic pole is provided to an end face 6' of a substrate 6 constituting a pair of nonmagnetic substrates 20. An end face 7' of a substrate 7 has a smooth and linear plane. A magnetic material is vapor-deposited toward an arrow head A from the oblique back side of the part 8. Thus a magnetic thin film 9 is formed on the face 7' as well as the upper surfaces of the substrate 7 and the substrate 6 at the forming side of the part 8. In such a way, the film 9 is attached to the end face 8' of the part 8. Then the substrate 20 is turned over and adhered to a magnetic substrate 4 attached with a coil 2 in a single body. Then a protecting film 12 is vapor-deposited to the substrate 20, and the height H of a main magnetic pole 1 formed with the film 9 is adjusted by polishing. Thus a vertical magnetic recording head structure 10 is obtained.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing a perpendicular magnetic recording head that is installed in a perpendicular magnetic recording device and controls information recording/reproduction.

Recent magnetic recording devices are becoming faster and faster, and there is a strong demand for the development of technology to improve the performance and reduce costs of the 9I magnetic head, which is a key point in device performance.

(b) Prior Art FIG. 2 is a side sectional view for explaining the conventional configuration of a perpendicular magnetic recording head, fa) is a diagram showing the basic configuration, and (b)
1 is a diagram showing an example of an implementation structure.

As shown in FIG. 2(a), in conventional perpendicular magnetic recording, a main magnetic pole 1 is provided upright on a magnetic body portion 4, and a main magnetic pole 1 is arranged so as to surround the main magnetic pole 1. It is composed of a coil 2.

Recording/reproduction on the medium 3 is performed by an information signal from the main pole 1 which is excited by the coil 2 and acts perpendicularly to the recording surface 3'' of the recording medium 3.

However, when implementing the conventional configuration described above, there are the following problems in terms of implementation.

■The main magnetic pole 1 has a thickness of 18 m or less 5 a width of 100 to 200
It is composed of a very thin band-shaped magnetic thin film of μm thickness. The thin film forming method is as shown in FIG.
A method of protecting the other end face is generally known, but the manufacturing method thereof is particularly difficult.

(2) The method of connecting the main magnetic pole 1 formed by the above method to the magnetic body 4 that supports it and is magnetically connected to the main magnetic pole 1 is difficult and the technology for this has not yet been established.

fc) Problems to be Solved by the Invention The present invention has been made to solve each of the above-mentioned problems, and it is possible to simultaneously form the main magnetic pole and the magnetic film connecting the main magnetic pole and the magnetic body part in one process. The object of the present invention is to provide a method for manufacturing a perpendicular magnetic recording device that can perform perpendicular magnetic recording.

fdl A means to solve the problem and the purpose thereof is to provide a recessed notch in the end face of one of the non-magnetic boards arranged with their end faces in electrical contact with each other, and to A magnetic thin film is coated on the exposed end surface of the other substrate and a substrate surface continuous thereto, and the side substrates are integrally combined in such a manner that the magnetic thin film on the substrate surface with which the side substrate is integrated is in contact with the magnetic substrate. Magnetic 9N9 of the other substrate end surface
This is achieved by providing a method for manufacturing a perpendicular magnetic recording head, characterized in that the main magnetic pole is constituted by:

By implementing the above means, a main magnetic pole is provided on the end surface exposed by the concave cutout, and a connecting portion for connecting the main magnetic pole and the magnetic material portion is provided on both substrate surfaces. Since they are formed at the same time, the above-mentioned problems (1) and (2) are solved at once.

(fl Example Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 is a diagram for explaining the method for forming a perpendicular magnetic recording head according to the present invention according to the processing steps, and the processing contents in each step are indicated by (al to el).

FIG. 1 (Al is a perspective view showing an example of the shape of the notch forming side substrate 6 and the main pole forming side substrate 7 constituting the pair of non-magnetic substrates 20, and the end surface 6' of the substrate 6 has a A notch 8 for forming a magnetic pole is provided, and the end surface 7' of the substrate 7 is finished into a flat linear plane for forming a main magnetic pole.

The figure fbl is α1!1 plane 6゛ and 7 shown in the previous figure fat.
The figure shows a state in which the main pole forming side substrate 7 has an end face 7'' exposed through the notch 8 provided in the notch forming side substrate 6.

In FIG. fC1, a magnetic material is deposited diagonally from the rear of the notch 8 in the direction of arrow A, and a magnetic thin film 9 is deposited on the end surface 7' of the main pole forming side substrate 7 and on the upper surface of the substrate 7 and the notch forming side substrate 6. This shows the state in which a is formed.

As shown, since the magnetic material is deposited obliquely from behind the notch 8, the magnetic thin film 9 does not adhere to the end face 8' of the notch 8.

In the same figure (cll is the substrate 6.
The protective film 12 is not shown to cover the magnetic thin film 9 after the non-magnetic substrate 20 consisting of the coil 2 is turned over and integrated onto the magnetic substrate 4 to which the coil 2 is attached. This is a BB' cross-sectional view, and the magnetic thin film 9 is safely protected by the protective film 12.

tel in the figure shows the height tl of the main pole 1 formed of the magnetic Al film 9 after the unnecessary portion of the protective film 12 has been removed by polishing.
FIG. 3 is a diagram showing a completed perpendicular magnetic recording head structure 1o after adjusting the perpendicular magnetic recording head structure 1o.

FIG. 3 is a perspective view illustrating an embodiment of the processing method of the present invention aimed at mass production, in which fat is a method of stacking a plurality of notch-forming substrates 6 and grinding them at once. The figure lb) showing an example of the shape of the notch 8 is an enlarged view.

By forming the notch 8 as shown in FIG.
Production efficiency is achieved.

(g) Effects of the Invention As explained in detail above, the method for manufacturing a perpendicular magnetic recording head according to the present invention can be carried out safely, reliably, and efficiently by providing a simply-shaped notch in the main pole forming portion. This has the great effect of making it possible to produce perpendicular magnetic recording heads.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining the manufacturing method of a perpendicular magnetic recording head according to the present invention according to the processing steps, FIG. 2 is an example cross-sectional view for explaining a conventional configuration of a throat for perpendicular magnetic recording,
The figure is a perspective view C for explaining an embodiment of the processing method for mass production of the present invention. In the figure, 1 is the main magnetic pole, 1' is the connection part, 2 is the coil, 3 is the recording medium, 4 is the magnetic material part, 5 is the non-magnetic material part, 6 is the notch forming side substrate, 6' is the notch forming The end face of the side substrate, 7 is the main magnetic pole forming side substrate, 7° is the end face of the main magnetic pole forming side substrate, 8 is the notch, 8゛ is the end face 9 of the notch is a magnetic thin film, 10 is 1-
and 1, a protective film 12, and a nonmagnetic substrate 20 consisting of a pair of substrates 6 and 7. 1121 Figure 2 (Q) 1J311!1

Claims (1)

[Claims] A concave notch is provided in the end surface of one of the non-magnetic substrates arranged with their end surfaces in close contact with each other, and the end surface of the other substrate exposed by the notch and the substrate surface continuous therewith are magnetic. A thin film is deposited to integrate both substrates, and the two substrates are integrally bonded in such a manner that the magnetic thin film on the surface of the substrate is in contact with the magnetic substrate, and the magnetic thin film on the end surface of the other substrate constitutes a main magnetic pole. A method of manufacturing a perpendicular magnetic recording head, characterized in that: