JPS62264412A - Perpendicularly magnetizing type thin film head - Google Patents
Perpendicularly magnetizing type thin film headInfo
- Publication number
- JPS62264412A JPS62264412A JP10729486A JP10729486A JPS62264412A JP S62264412 A JPS62264412 A JP S62264412A JP 10729486 A JP10729486 A JP 10729486A JP 10729486 A JP10729486 A JP 10729486A JP S62264412 A JPS62264412 A JP S62264412A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic pole
- film
- block
- magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 48
- 230000005291 magnetic effect Effects 0.000 claims abstract description 74
- 239000010408 film Substances 0.000 claims abstract description 36
- 230000035699 permeability Effects 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000002131 composite material Substances 0.000 claims abstract description 6
- 230000005415 magnetization Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 8
- 239000000696 magnetic material Substances 0.000 abstract description 5
- 238000010992 reflux Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野コ
この発明は垂直磁化型薄膜ヘッド、更に詳しくは、薄膜
技術により製造され、垂直磁気記録媒体に対し記録再生
を行なうための垂直磁化型薄膜ヘッドに関する。[Detailed Description of the Invention] [Industrial Field of Application] This invention relates to a perpendicular magnetization type thin film head, more specifically, a perpendicular magnetization type thin film head manufactured by thin film technology and used for recording and reproducing a perpendicular magnetic recording medium. Regarding.
［従来の技術］
「第８回日本応用磁気学会学術、：１４演概要集（１９
８４，１１）Ｐ、２５１Ｊに第３図に示すような構造の
垂直磁化型薄膜ヘッドが掲載されている。この薄膜ヘッ
ド１は、第３図に示すようにネオセラム、結晶化ガラス
等の非磁性基板２の面を研磨し、同研磨面にコバルト系
のアモルファス。[Prior art] “The 8th Academic Conference of the Japanese Society of Applied Magnetics, 14 Abstracts (19
84, 11) P, and 251J disclose a perpendicular magnetization type thin film head having a structure as shown in FIG. As shown in FIG. 3, this thin film head 1 polishes the surface of a nonmagnetic substrate 2 made of neoceram, crystallized glass, etc., and coats the polished surface with a cobalt-based amorphous material.
或いはセンダスト、或いはパーマロイ窩の１−６透磁率
磁性体合金からなる主磁極膜３が周知の薄膜技術により
形成されている。この主磁極膜３の膜厚は、磁気記録再
生の分解能を上げるため、０．２〜０．３μｍ程度とさ
れている。しかし、主磁極膜３の膜厚がこのように薄い
と磁気的飽和を生じて性能が劣化するので、この磁気的
飽和を防１１−するために、主磁極膜３を薄膜技術によ
り形成したあと、この主磁極膜３の先端部（第３図では
下端部）を数μｍ−ｍ−数十μ日除膜形成面」−に、−
１，記＋磁極膜３と同材質で、同＋磁極膜３よりも膜厚
の十分に大きい補助コア４か同様の薄膜技術により形成
される。そして、この補助コア４の平坦化した膜形成面
上に薄膜コイル６、電気絶縁層５および還流磁極７が形
成され、このあと、これらを保護するために非磁性材か
らなる保護ブロック８が非磁性の接着剤９等を用いて非
磁性基板２に貼り合わされてこの薄膜ヘッド１が完成す
る。Alternatively, the main pole film 3 made of Sendust or a 1-6 magnetic permeability magnetic alloy with permalloy cavities is formed by a well-known thin film technique. The thickness of the main magnetic pole film 3 is approximately 0.2 to 0.3 μm in order to improve the resolution of magnetic recording and reproduction. However, if the main magnetic pole film 3 is thin like this, magnetic saturation occurs and performance deteriorates, so in order to prevent this magnetic saturation, the main magnetic pole film 3 is formed using thin film technology. , the tip of the main magnetic pole film 3 (lower end in FIG. 3) is removed on the film-removal surface for several micrometers to several tens of micrometers.
1. The auxiliary core 4 is made of the same material as the magnetic pole film 3 and is sufficiently thicker than the magnetic pole film 3, or is formed by a similar thin film technology. Then, a thin film coil 6, an electrical insulating layer 5, and a return magnetic pole 7 are formed on the flattened film forming surface of this auxiliary core 4, and then a protective block 8 made of a non-magnetic material is installed to protect them. This thin film head 1 is completed by bonding it to a nonmagnetic substrate 2 using a magnetic adhesive 9 or the like.
［発明が解決しようとする問題点］
ところで、上記第３図に示した薄膜ヘッドの構造では、
主Ｉｉａ極膜３を形成したのち、この主磁極膜３の薄膜
パターンの上に補助コア４を膜形成しなければならない
ので、薄膜形成の工程か多くなり、製造上不利なものと
なっていた。[Problems to be Solved by the Invention] By the way, in the structure of the thin film head shown in FIG. 3 above,
After forming the main Iia pole film 3, the auxiliary core 4 must be formed on the thin film pattern of the main pole film 3, which increases the number of thin film formation steps, which is disadvantageous in manufacturing. .
この発明は、このような問題点に着目してなされたもの
で、補助コアの薄膜形成の工程を省略できて製造容易な
垂直磁化型薄膜ヘッドを提供することを１」的とする。The present invention has been made in view of these problems, and an object of the present invention is to provide a perpendicular magnetization type thin film head that is easy to manufacture and can omit the step of forming a thin film for an auxiliary core.
［問題点を解決するための手段および作用］この発明の
垂直磁化型薄膜ヘッドは、高透磁率磁性体ブロックと非
磁性体ブロックとの調合体からなる基板に主磁極膜が薄
膜パターンの形成によって接合されていて、主磁極膜の
先端部に非磁性体ブロックが対接し、先端部を除く他の
部分に高透磁率磁性体ブロックが対接する構造となって
いて、高透磁率磁性体ブロックが前記公知の垂直磁化型
薄膜ヘッドにおける補助コアと同等の磁気的飽和を防止
する役目をなす。[Means and effects for solving the problems] In the perpendicular magnetization type thin film head of the present invention, the main magnetic pole film is formed on a substrate made of a composite of a high magnetic permeability magnetic block and a nonmagnetic block by forming a thin film pattern. The structure is such that a non-magnetic block is in contact with the tip of the main pole film, and a high-permeability magnetic block is in contact with the rest of the main pole film except for the tip. It serves to prevent magnetic saturation similar to that of the auxiliary core in the known perpendicular magnetization type thin film head.
［実 施 例］ 以下、この発明を図示の実施例によって説明する。[Example] The present invention will be explained below with reference to illustrated embodiments.
第１図は、この発明の一実施例を示す垂直磁化型薄膜ヘ
ッドの要部の概略構造である。この薄膜へラド１１にお
いては、主磁極膜３を膜形成するための基板として、高
透磁率磁性体ブロック１３と非磁性体ブロック１４とを
接合して一体化してなる１夏合体基板１２が用いられる
。この；夏合体ノ１（板１２の一面が研磨され、この研
磨面に主磁Ｈｆｉ膜３が薄膜技術により形成されている
。この主錫、極膜３の膜厚は記録再生の分解能を１−げ
るために０．２〜０．３μｍ程度とされている。この主
磁極膜３の形成により、同主磁極膜３は、磁気記録媒体
（図示せず）に近い先端部（第１図中、下端部）で上記
調合体基板１２の非は性体ブロック１４の部分と数μｍ
−数十μｍ程度の長さ範囲で対接しており、主磁極膜３
の先端部を除く他の部分で複合体基板１２の高透磁率磁
性体ブロック１３の部分と対接している。この主磁極膜
３の形成後、薄膜形成プロセス及びエツチングプロセス
により、アルミニウム等からなる薄膜コイル５．７代気
絶縁層５および高透磁率磁性材からなる還流磁極７等の
薄膜パターンが形成される。還流磁極７は主磁極膜３に
同主磁極膜３の高透磁率磁性材ブロック１３と対向して
いる部分で直接接合しており、前記従来例における補助
コア４（第３図参照）の薄膜形成の工程が省かれている
。最後に、上記薄膜パターンを保訛するための非磁性材
からなる保護ブロック８か１勺合体ＪＩ１．１ｌｌｉ２
１２に貼り合わされて薄膜ヘッド１１を完成する。FIG. 1 is a schematic structure of the main parts of a perpendicular magnetization type thin film head showing an embodiment of the present invention. In this thin film helad 11, as a substrate for forming the main pole film 3, a one-sum integrated substrate 12 formed by bonding and integrating a high magnetic permeability magnetic block 13 and a non-magnetic block 14 is used. It will be done. One surface of the plate 12 is polished, and a main magnetic Hfi film 3 is formed on this polished surface by thin film technology. The main pole film 3 is formed to have a thickness of about 0.2 to 0.3 μm in order to provide a magnetic recording medium (not shown). The difference between the compound substrate 12 (middle and lower end) is a few μm from the part of the solid body block 14.
-The main magnetic pole film 3
is in contact with the high permeability magnetic block 13 of the composite substrate 12 at other parts except for the tip. After forming the main magnetic pole film 3, thin film patterns such as a thin film coil 5, 7, an air insulating layer 5 made of aluminum or the like, and a return magnetic pole 7 made of a high permeability magnetic material are formed by a thin film forming process and an etching process. . The return magnetic pole 7 is directly bonded to the main magnetic pole film 3 at the part of the main magnetic pole film 3 that faces the high permeability magnetic material block 13, and is similar to the thin film of the auxiliary core 4 (see FIG. 3) in the conventional example. The forming process is omitted. Finally, combine 8 or 1 protective blocks made of non-magnetic material to protect the thin film pattern.
12 to complete the thin film head 11.
このような構成の薄膜ヘッド１１では、主磁極膜３の膜
厚は既述したように、分解能の向上のために非常に薄い
ものとされていて、１反合体基板１２の非磁性体ブロッ
ク１４に対応している先端部でその目的か十分に達成さ
れているとともに、従来の薄膜ヘッドにおける補助コア
と同等の役目を調合体基板１２の高透磁率磁性体ブロッ
ク１３が果たしており、主磁極膜３の膜厚か薄い二とに
よって生じる磁気的飽和は上記磁性体ブロック１３によ
り防止されている。In the thin film head 11 having such a configuration, the thickness of the main pole film 3 is made extremely thin to improve resolution, as described above, and the thickness of the main magnetic pole film 3 is made very thin to improve resolution. This purpose has been fully achieved by the tip portion corresponding to Magnetic saturation caused by the thickness of the film 3 or the thin film 2 is prevented by the magnetic block 13.
第２図は、この発明の他の実施例を示す垂直磁化型薄膜
ヘッドの要部の概略構造である。この薄膜ヘッド２１は
、前記薄膜ヘッド１１における１夏合体基板１２の代り
に１夏合体基板２２を用いたものであり、その他の部分
は前記薄膜へラド１１と同様の構成とされている。１（
合体基板２２は非磁性体ブロック２４の一面に形成され
た四部２４ａに高透磁率磁性体ブロック２３を１を父め
込んで両ブロックを接合し一体化してなるものである。FIG. 2 is a schematic structure of a main part of a perpendicular magnetization type thin film head showing another embodiment of the present invention. This thin film head 21 uses a single summer combined substrate 22 in place of the single summer combined substrate 12 in the thin film head 11, and has the same structure as the thin film head 11 in other parts. 1(
The combined substrate 22 is made by inserting the high magnetic permeability magnetic block 23 into four parts 24a formed on one surface of the non-magnetic block 24, and then joining and integrating both blocks.
この一体化してなる調合体）λ板２２の高透磁率磁性体
ブロック２３と非磁性体ブロック２４の而を研磨して平
坦化したのち、この研磨面に主磁極膜３か薄膜技術によ
ってパターン形成される。この調合体基板２２に形成さ
れた主磁極膜３は先端部で非磁性体ブロック２４と対接
し、先端部を除く他の部分で高透磁率磁性体ブロック２
３と対接している。そして、この主磁極膜３の膜形成面
上高透磁率磁性体ブロック２３と対接している部分で、
前記薄膜へラド１１の場合と同様に、補助コア４（第３
図参照）を介することなく、還流磁極７が直接に接合し
ている。高透磁率磁性体ブロック２３は補助コア４と同
様に磁気的飽和を防止する作用をなす。After polishing and flattening the high permeability magnetic block 23 and non-magnetic block 24 of the λ plate 22, a pattern is formed on the polished surface using the main magnetic pole film 3 or thin film technology. be done. The main magnetic pole film 3 formed on the composite substrate 22 is in contact with the non-magnetic block 24 at the tip, and the high magnetic permeability magnetic block 24 in other parts except for the tip.
It faces 3. Then, in the part of the main pole film 3 that is in contact with the high permeability magnetic block 23 on the film forming surface,
As in the case of the thin film helad 11, the auxiliary core 4 (third
The reflux magnetic poles 7 are directly connected to each other without intervening (see figure). The high magnetic permeability magnetic block 23 functions similarly to the auxiliary core 4 to prevent magnetic saturation.
［発明の効果］
以上述べたように、この発明によれば、主磁極膜１巻線
環体等の薄膜を形成するための基板として高透磁率磁性
体ブロックと非磁性体ブロックとの複合体を用いている
ため、従来必要であった磁気的飽和を防止するための補
助コアを省くことができ、薄膜形成工程を削減すること
ができて製造上有利であり、構成も簡１１１−になる。[Effects of the Invention] As described above, according to the present invention, a composite of a high magnetic permeability magnetic block and a non-magnetic block can be used as a substrate for forming a thin film such as a main pole film 1 winding ring. Since this method uses an auxiliary core to prevent magnetic saturation, which was required in the past, it is possible to eliminate the need for a thin film formation process, which is advantageous in terms of manufacturing, and the structure is also simplified. .
第１図は、この発明の一実施例を示す垂直磁化型薄膜ヘ
ッドの要部を拡大した概略断面図、第２図は、この発明
の他の実施例を示す垂直磁化型薄膜ヘントの要部を拡大
した概略断面図、第３図は、従来の垂直磁化型薄膜ヘッ
トの一例の要部を拡大した概略断面図である。FIG. 1 is an enlarged schematic sectional view of the main part of a perpendicular magnetization type thin film head showing one embodiment of the present invention, and FIG. 2 is a main part of a perpendicular magnetization type thin film head showing another embodiment of the invention. FIG. 3 is an enlarged schematic sectional view of a main part of an example of a conventional perpendicular magnetization type thin film head.
Claims (1)
からなる基板と、 この基板の非磁性体ブロックに先端部で接合され、同先
端部を除く他の部分で上記高透磁率磁性体ブロックに接
合されている主磁極膜と、 この主磁極膜を接合された基板上に形成された薄膜コイ
ルと、 を有してなることを特徴とする垂直磁化型薄膜ヘッド。[Claims] A substrate consisting of a composite of a high magnetic permeability magnetic block and a non-magnetic block, the tip of which is joined to the non-magnetic block, and other parts other than the tip are A perpendicular magnetization type thin film head comprising: a main pole film bonded to a high magnetic permeability magnetic block; and a thin film coil formed on a substrate to which the main pole film is bonded.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10729486A JPS62264412A (en) | 1986-05-10 | 1986-05-10 | Perpendicularly magnetizing type thin film head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10729486A JPS62264412A (en) | 1986-05-10 | 1986-05-10 | Perpendicularly magnetizing type thin film head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62264412A true JPS62264412A (en) | 1987-11-17 |
Family
ID=14455454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10729486A Pending JPS62264412A (en) | 1986-05-10 | 1986-05-10 | Perpendicularly magnetizing type thin film head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62264412A (en) |
-
1986
- 1986-05-10 JP JP10729486A patent/JPS62264412A/en active Pending
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