JPS60157710A - Single magnetic pole type magnetic head for vertical recording - Google Patents

Abstract

PURPOSE:To improve the accuracies of working and adhesion and to obtain a magnetic head having high sensitivity and high recording and reproducing efficiencies by forming a magnetic body joined magnetically to the magnetic material part of the 1st core at a part piercing a thin film coil formed on the 1st core. CONSTITUTION:A main magnetic pole 13 and a thin film coil 14 are formed on the 1st composite core consisting of a nonmagnetic material part 11 and a soft magnetic material part 12, a projection-shaped soft magnetic material part 17' is formed at a part piercing the coil 14, and the 2nd composite core consisting of nonmagnetic material parts 15, 16 and soft magnetic material part 17 is joined. The part 17' is made of an oxide type soft magnetic material or a thin filmlike soft magnetic material, and it pierces the inside of the coil 14 and forms a magnetic path for magnetic flux for vertical recording. Nonmagnetic material parts 18a, 18b flatten the joining surfaces of the 1st and the 2nd composite cores. Thus, the 1st and the 2nd composite cores can be adhered to each other with an adhesive layer of 0.1-0.2mum thickness, so blocking is prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a perpendicular recording single-pole magnetic head suitable for performing high-density magnetic recording.

BACKGROUND ART AND PROBLEMS A perpendicular recording tile magnetic pole type magnetic head has been proposed that magnetically records on a magnetic recording medium by changing the magnetic flux in the thickness direction, that is, in the perpendicular direction, of the magnetic recording medium such as a flexible disk.
It is known that high-density recording is possible compared to longitudinal magnetic recording. FIG. 1 shows an example of a conventional single-pole magnetic head for perpendicular recording. In this example, a main pole (2) made of a thin film of a soft magnetic material with high magnetic permeability and high magnetic flux density is formed at a predetermined position on the side surface of a non-magnetic material (1), and a coil (3) is further formed with a thin film. , on top of that again the main magnetic pole (
A soft magnetic thin film (4) made of the same material as 2) is completely deposited,
A magnetic head for perpendicular recording is formed with a single main pole without an auxiliary pole by reinforcing it with a non-magnetic material (5).

This magnetic head can be easily miniaturized and highly accurate.
It has the advantage of being suitable for mass production, and because of its low inductance, it is suitable for recording and reproducing high-frequency signals.

However, in this example, since all the magnetic circuits are in the form of thin films, there are disadvantages in that the magnetic resistance is large and the magnetic flux return effect is small.

Furthermore, there is a problem in that the magnetic material near the thin film coil (3) is easily saturated during recording, and the tip of the main pole (2) is not sufficiently magnetized, resulting in poor recording and reproducing efficiency.

In addition, FIG. 2 shows a first composite core consisting of a non-magnetic material part (6) and a magnetic phase part (7), which has a thin film coil (3), a main magnetic pole and a main magnetic pole member (2), and a non-magnetic material part (6) and a magnetic phase part (7). This is an example in which a second composite core with a magnetic material (5) bonded and reinforced is joined.

This magnetic head has the advantage of having a large return path effect for the magnetic flux Φ, and also that it is easy to form the thin film coil (3) because there is no step on the surface on which the thin film coil (3) is formed.

However, in this magnetic head, the main magnetic pole member (2), which forms the magnetic path of the magnetic flux passing through the main magnetic pole, has a large magnetic resistance because it is in the form of a thin film. Since it is easily saturated, it still has the disadvantage of poor recording and reproducing efficiency.

In addition, in Fig. 3, a thin film coil (9) is formed on a soft magnetic block (8) with high magnetic permeability, and the main magnetic pole αO is arranged at the center of the thin film coil (9), and the main magnetic pole αO is placed on the sliding surface side of the magnetic recording medium. is provided with a non-magnetic material portion aD, (121).This example has the advantage that the tip of the main magnetic pole αO is easily magnetized during recording.

However, this head has the disadvantage that it is difficult to configure the inductance to be small, and recording and reproducing efficiency is poor.

In addition, FIG. 4 shows a first composite core consisting of a non-magnetic material part OD and a magnetic material part O2, a main magnetic pole G3) and a thin film coil (
This is an example in which a second composite core consisting of a non-magnetic material part (15), (1,6+) and a magnetic material part (17) is provided.

This magnetic head has low magnetic resistance in the magnetic circuit,
Because the magnetic thin film near coil α4) is difficult to saturate during recording, and the magnetic flux return path has a large effect,
Unlike the word examples shown in FIGS. 1 to 3 above, recording and reproducing efficiency is good.

However, in this example, the magnetic material part 0η forming the second core is magnetically bonded to the other end side of the main magnetic pole (13) so as to form a magnetic path passing through the thin film coil (141). Therefore, when mass producing heads, if the substrate that serves as the first core is curved or the unevenness of the butting surface is uneven depending on the location, the thickness of the bonding layer will vary and the required A uniform bonding layer with a thickness of 01 to 02 μm cannot be obtained.Furthermore, there is a problem in that the thickness of the bonding layer on the tape sliding surface side also varies.

As described above, there is a problem in that there is no thin-film coil type single-pole magnetic head for perpendicular recording that can be mass-produced and has good recording and reproducing efficiency.

OBJECTS OF THE INVENTION In view of the above, an object of the present invention is to provide a single-pole magnetic head for perpendicular recording that has good recording and reproducing efficiency and is suitable for mass production.

Summary of the Invention The single-pole magnetic head for perpendicular recording of the present invention comprises a main pole formed of a soft magnetic thin film on one plane of a first core and having one end extending to the sliding surface of a magnetic recording medium, and a magnetic recording medium. A second core composed of a non-magnetic material part on the sliding surface side and a magnetic material part magnetically connected to the main magnetic pole, and a thin film coil with the magnetic path on the other end side of the main magnetic pole facing inside. It has a magnetic material placed in the center of the thin film coil so as to be magnetically coupled with the magnetic material part, and a third core with a flattened surface.It is mass-produced to improve the efficiency of recording and reproducing. It was designed to be suitable for

EXAMPLE Hereinafter, an example of the single-pole type magnetic head for perpendicular recording of the present invention will be described with reference to FIG. In FIG. 5, parts corresponding to those in FIG. 4 are marked with 1-, and detailed explanation thereof will be omitted.

Fig. 5 shows that a main magnetic pole 03) and a thin film coil (14) are formed on a first composite core consisting of a non-magnetic material part aυ and a soft magnetic material part α2, and a part penetrating the thin film coil (14) is also formed. A protruding soft magnetic material part αη is formed, and a nonmagnetic material s(1ω, (1
61 and a second composite core consisting of a soft magnetic material part a are joined. Here, the soft magnetic material part (17 is made of oxide-based soft magnetic material or thin film-like soft magnetic material, and the thin film coil α
The magnetic flux passes through the inner side of the shaft to form a magnetic path for magnetic flux for perpendicular recording. Further, (18K) and (18b) are non-magnetic material portions that flatten the bonding surfaces with the first core and the second core. The other parts are formed in the same manner as a conventional single-pole magnetic head for perpendicular recording.

In this embodiment, magnetic flux passes through a magnetic path formed by the protruding soft magnetic material portion (17'), the soft magnetic material 07), and the main magnetic pole (13) due to the excitation current of the thin film coil 04). Then, magnetic flux passes perpendicularly from the main pole tip (13a) on the side of the magnetic recording medium sliding surface S to the perpendicular recording layer (not shown) of the magnetic recording medium that moves in the left-right direction on the sliding surface S. It will be recorded magnetically.

Next, with reference to FIG. 6, an example of a method for manufacturing the perpendicular recording single pole type magnetic head of this embodiment will be described.

FIG. 6 shows a soft magnetic material part (1) penetrating the thin film coil (04).
Seven forming methods are shown. Figure 6A shows a resist pattern A9 created on the first composite core having a coil shielded with a non-magnetic material, and a hole made in the center of the thin film coil by wet or dry etching. It is something that

FIG. 6B shows a structure in which a soft magnetic material α& is filled by a method such as vapor deposition, sputtering, ion blating, or plating. Figure 6C shows the soft magnetic material (1
8C) is removed along with the photoresist (lift-off),
The magnetic material portion (17/) is formed by removing the excess soft magnetic material by dry etching, polishing, etc. and flattening it. When a second composite core is bonded to this, the magnetic head of this embodiment shown in FIG. 5 is completed.

Further, FIG. 7 shows another method for forming the soft magnetic material portion (17') and the soft magnetic material 09 portion penetrating the thin film coil of this example. That is, the resist pattern (19
(Fig. 7A) and soft magnetic materials such as magnetic ferrite, permalloy, sendust, magnetic amorphous, etc. (Fig. 7B) by wet or dry etching.
Form a protrusion as shown in FIG. 7C with the first composite core
After adhering as shown in FIG. 6C, all the protrusions are removed by dry etching, polishing, etc., leaving only the protrusions, resulting in a result similar to that shown in FIG. 6C. A second composite core is joined to this to complete the perpendicular recording single pole type magnetic head of this embodiment.

In this embodiment, a magnetic material part that is magnetically bonded to the magnetic material part of the first composite core is newly provided in a part that penetrates the thin film coil formed on the first composite core. The first composite core and the second composite core are bonded with an adhesive layer thickness of 01 to 0.2.
Since it can be bonded in μm, there is an advantage that clocking does not occur, and a magnetic head with high sensitivity and high recording/reproducing efficiency can be obtained.

Further, since alignment is easy when bonding the first composite core and the second composite core, there is also the advantage that manufacturing is facilitated.

Or, a soft magnetic material part (1
7') may be formed in a single layer as shown in FIG.
As shown in the figure, this may be formed of a multilayer thin film consisting of a soft magnetic material part (17'a) and a nonmagnetic material part (17'b), and either of these can realize a magnetic path with low high frequency loss. In FIG. 10, the magnetic material near the coil of the second composite core is made of a non-magnetic material.

This example has the advantage of reducing leakage magnetic flux between the first composite core and the second composite core.

Effects of the Invention According to the single-pole magnetic head for perpendicular recording of the present invention, the magnetic material is magnetically bonded to the magnetic material portion of the first core in the portion penetrating the thin film coil formed on the first core. By newly providing a There is an advantage that a magnetic head with high sensitivity and good recording and reproducing efficiency can be obtained. Also,
The first core is large.

[Brief explanation of drawings]

1, 2, 3, and 4 are cross-sectional views showing examples of conventional single-pole magnetic heads for perpendicular recording, and FIG. 5 is cross-sectional views showing examples of single-pole magnetic heads for perpendicular recording of the present invention. 6 and 7 are diagrams showing the main parts of the manufacturing process of the example shown in FIG. 5, and FIG. 8, FIG. 9, and FIG.
Figure 0 is a diagram showing other embodiments of the present invention. θ1) is a non-magnetic material part, 02 is a magnetic material part, α3) is a main magnetic pole, ■ is a thin film coil, 09 and (16) are a non-magnetic material part, (
171° (17 is the magnetic material part, S is the magnetic recording medium sliding surface.

Claims (1)

[Claims] A main magnetic pole formed of a soft magnetic thin film on one plane of the first core and having one end extending to the magnetic recording medium sliding surface, a non-magnetic material portion on the side of the magnetic recording medium sliding surface, and the main magnetic pole. A composite core of magnetic material part that is magnetically connected to
A thin film coil with the magnetic path on the other end side of the main magnetic pole facing inside, and a magnetic body disposed in the center of the thin film coil so as to be magnetically coupled with the magnetic material portion, and a flat surface. 1. A single-pole magnetic head for perpendicular recording, characterized in that it has a third core.