JPS61158840U - - Google Patents
Info
- Publication number
- JPS61158840U JPS61158840U JP4357285U JP4357285U JPS61158840U JP S61158840 U JPS61158840 U JP S61158840U JP 4357285 U JP4357285 U JP 4357285U JP 4357285 U JP4357285 U JP 4357285U JP S61158840 U JPS61158840 U JP S61158840U
- Authority
- JP
- Japan
- Prior art keywords
- optical element
- laser beam
- long optical
- light source
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims 5
- 238000007689 inspection Methods 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 230000002950 deficient Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Description
第１図は本考案一実施例装置の概略構成図、第
２図は被検体である長尺シリンダレンズの平面図
、第３図は同上シリンダレンズの側面図、第４図
はきずの傾斜方向によつて検出感度が低下するこ
とを説明するための図、第５図は本考案の別実施
例装置の概略構成図、第６図は二つのビームを交
叉させてシリンダレンズに入射させた状態を示す
図、第７図は本考案のさらに別の実施例装置の概
略構成図である。
１……長尺シリンダレンズ、２……レーザ光源
、３……ビームエキスパンダ、５……シリンダレ
ンズ、８……受光素子。
Fig. 1 is a schematic diagram of an apparatus according to an embodiment of the present invention, Fig. 2 is a plan view of a long cylindrical lens to be examined, Fig. 3 is a side view of the same cylinder lens, and Fig. 4 is a direction of inclination of flaws. Fig. 5 is a schematic configuration diagram of another embodiment of the device of the present invention, and Fig. 6 shows a state in which two beams are crossed and made incident on the cylinder lens. FIG. 7 is a schematic diagram of a device according to another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Long cylinder lens, 2... Laser light source, 3... Beam expander, 5... Cylinder lens, 8... Light receiving element.
Claims (1)
表面のきずや内部の微妙な微少異物などの欠陥部
を検出する、長尺光学素子の検査装置であつて、
レーザ光源と、該レーザ光源からのレーザビーム
を被検体の幅方向に広げた後、この広げた方向と
直交する方向に、細長く絞り込んで被検体に入射
させる光学系と、被検体をこの長手方向に移動さ
せたとき、この移動の間に、レーザビームの入射
に伴つて前記欠陥部から散乱する光を検出する受
光素子とを備えた長尺光学素子の検査装置。 An inspection device for a long optical element, which uses a light-transmissive long optical element as an object to be inspected and detects defects such as scratches on the surface of the long optical element and minute foreign matter inside the element,
a laser light source, an optical system that spreads the laser beam from the laser light source in the width direction of the object, narrows it down into a narrow strip in a direction perpendicular to the spread direction, and makes the laser beam enter the object; An inspection apparatus for an elongated optical element, comprising: a light receiving element that detects light scattered from the defective portion when a laser beam is incident thereon during the movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4357285U JPS61158840U (en) | 1985-03-26 | 1985-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4357285U JPS61158840U (en) | 1985-03-26 | 1985-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61158840U true JPS61158840U (en) | 1986-10-02 |
Family
ID=30555366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4357285U Pending JPS61158840U (en) | 1985-03-26 | 1985-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61158840U (en) |
-
1985
- 1985-03-26 JP JP4357285U patent/JPS61158840U/ja active Pending
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