JPH0441651U - - Google Patents

Info

Publication number
JPH0441651U
JPH0441651U JP8386690U JP8386690U JPH0441651U JP H0441651 U JPH0441651 U JP H0441651U JP 8386690 U JP8386690 U JP 8386690U JP 8386690 U JP8386690 U JP 8386690U JP H0441651 U JPH0441651 U JP H0441651U
Authority
JP
Japan
Prior art keywords
light
spherical
objective lens
inspected
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8386690U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8386690U priority Critical patent/JPH0441651U/ja
Publication of JPH0441651U publication Critical patent/JPH0441651U/ja
Pending legal-status Critical Current

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Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の具体的な一実施例を説明する
ための光学系の概略俯瞰図である。なお図面中に
用いられている符号において ＬＳ……光源、ＳＭＰ……被検体球状物、ＯＬ
……対物レンズ、ＨＭ……ハーフミラー、ＤＴ…
…ＣＣＤカメラ、である。 FIG. 1 is a schematic overhead view of an optical system for explaining a specific embodiment of the present invention. In addition, in the symbols used in the drawings: LS...Light source, SMP...Subject spherical object, OL
...Objective lens, HM...Half mirror, DT...
...It is a CCD camera.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 光源からの光を被検体である球状物に照射して
、この受光面の受光像を検査する球面部のキズ検
出装置において、光源からの平行光束を収束させ
る対物レンズを設けるとともに、この対物レンズ
の焦点に被検体球状物の中心を配置させることを
特徴とする球面部のキズ検出装置。 In a flaw detection device for a spherical surface that irradiates light from a light source onto a spherical object to be inspected and inspects a light-receiving image on the light-receiving surface, an objective lens is provided to converge the parallel light beam from the light source, and the objective lens A flaw detection device for a spherical part, characterized in that the center of a spherical object to be inspected is placed at the focal point of the object.
JP8386690U 1990-08-07 1990-08-07 Pending JPH0441651U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8386690U JPH0441651U (en) 1990-08-07 1990-08-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8386690U JPH0441651U (en) 1990-08-07 1990-08-07

Publications (1)

Publication Number Publication Date
JPH0441651U true JPH0441651U (en) 1992-04-08

Family

ID=31631893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8386690U Pending JPH0441651U (en) 1990-08-07 1990-08-07

Country Status (1)

Country Link
JP (1) JPH0441651U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107092A (en) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk Surface inspection apparatus and surface inspection system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011107092A (en) * 2009-11-20 2011-06-02 Kobelco Kaken:Kk Surface inspection apparatus and surface inspection system

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