JPH0331084U - - Google Patents
Info
- Publication number
- JPH0331084U JPH0331084U JP1989091594U JP9159489U JPH0331084U JP H0331084 U JPH0331084 U JP H0331084U JP 1989091594 U JP1989091594 U JP 1989091594U JP 9159489 U JP9159489 U JP 9159489U JP H0331084 U JPH0331084 U JP H0331084U
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- kaleidoscope
- uniform
- parabolic mirror
- intensity distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003384 imaging method Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Lenses (AREA)
Description
第1図は、本発明の実施例に係るレーザビーム
結像装置の模式図、第2図は、従来のビーム結像
装置の模式図、第3図は従来のビーム結像装置に
よる加工時の模式図、第4図は従来のビーム結像
装置による位置合せ時の模式図である。
1……レーザ光、2……カライドスコープ、1
0……放物面ミラー、11……結像ビーム。
Fig. 1 is a schematic diagram of a laser beam imaging device according to an embodiment of the present invention, Fig. 2 is a schematic diagram of a conventional beam imaging device, and Fig. 3 is a schematic diagram of a laser beam imaging device according to an embodiment of the present invention. The schematic diagram and FIG. 4 are schematic diagrams at the time of alignment using a conventional beam imaging device. 1... Laser light, 2... Kaleidoscope, 1
0... Parabolic mirror, 11... Imaging beam.
Claims (1)
レーザ加工を行う場合のレーザビーム結像光学系
に放物面ミラーを設け、レーザビーム強度分布を
矩形化、均一化することを特徴とするレーザビー
ム結像装置。 A laser beam focusing system characterized in that a parabolic mirror is provided in a laser beam imaging optical system when laser processing is performed using a kaleidoscope on an incident laser beam, and the laser beam intensity distribution is made rectangular and uniform. image device.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989091594U JPH0331084U (en) | 1989-08-03 | 1989-08-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989091594U JPH0331084U (en) | 1989-08-03 | 1989-08-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0331084U true JPH0331084U (en) | 1991-03-26 |
Family
ID=31641069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989091594U Pending JPH0331084U (en) | 1989-08-03 | 1989-08-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0331084U (en) |
-
1989
- 1989-08-03 JP JP1989091594U patent/JPH0331084U/ja active Pending
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