JPS61157912A - 質量流量制御装置 - Google Patents

質量流量制御装置

Info

Publication number
JPS61157912A
JPS61157912A JP27911784A JP27911784A JPS61157912A JP S61157912 A JPS61157912 A JP S61157912A JP 27911784 A JP27911784 A JP 27911784A JP 27911784 A JP27911784 A JP 27911784A JP S61157912 A JPS61157912 A JP S61157912A
Authority
JP
Japan
Prior art keywords
gas
mass flow
signal
flow rate
amplifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27911784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0363087B2 (enrdf_load_stackoverflow
Inventor
Isao Suzuki
勲 鈴木
Takashi Sudo
隆 須藤
Takeshi Nakamura
剛 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON TAIRAN KK
Original Assignee
NIPPON TAIRAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON TAIRAN KK filed Critical NIPPON TAIRAN KK
Priority to JP27911784A priority Critical patent/JPS61157912A/ja
Publication of JPS61157912A publication Critical patent/JPS61157912A/ja
Publication of JPH0363087B2 publication Critical patent/JPH0363087B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP27911784A 1984-12-29 1984-12-29 質量流量制御装置 Granted JPS61157912A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27911784A JPS61157912A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27911784A JPS61157912A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Publications (2)

Publication Number Publication Date
JPS61157912A true JPS61157912A (ja) 1986-07-17
JPH0363087B2 JPH0363087B2 (enrdf_load_stackoverflow) 1991-09-30

Family

ID=17606657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27911784A Granted JPS61157912A (ja) 1984-12-29 1984-12-29 質量流量制御装置

Country Status (1)

Country Link
JP (1) JPS61157912A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139609U (enrdf_load_stackoverflow) * 1987-03-02 1988-09-14
JPH04133109A (ja) * 1990-09-26 1992-05-07 Tokimec Inc 電磁式流体機器の機差補正システム
JPH04133110A (ja) * 1990-09-26 1992-05-07 Tokimec Inc 電磁式流体機器の機差補正システム
JP2010015580A (ja) * 2001-04-24 2010-01-21 Celerity Inc 質量流量コントローラのシステムおよび方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63139609U (enrdf_load_stackoverflow) * 1987-03-02 1988-09-14
JPH04133109A (ja) * 1990-09-26 1992-05-07 Tokimec Inc 電磁式流体機器の機差補正システム
JPH04133110A (ja) * 1990-09-26 1992-05-07 Tokimec Inc 電磁式流体機器の機差補正システム
JP2010015580A (ja) * 2001-04-24 2010-01-21 Celerity Inc 質量流量コントローラのシステムおよび方法

Also Published As

Publication number Publication date
JPH0363087B2 (enrdf_load_stackoverflow) 1991-09-30

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