JPS61154139A - ウェハキャリア運搬具 - Google Patents

ウェハキャリア運搬具

Info

Publication number
JPS61154139A
JPS61154139A JP59274107A JP27410784A JPS61154139A JP S61154139 A JPS61154139 A JP S61154139A JP 59274107 A JP59274107 A JP 59274107A JP 27410784 A JP27410784 A JP 27410784A JP S61154139 A JPS61154139 A JP S61154139A
Authority
JP
Japan
Prior art keywords
wafer carrier
handle
carrier
protrusion
arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59274107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027184B2 (enExample
Inventor
Yutaka Hojo
北城　豊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP59274107A priority Critical patent/JPS61154139A/ja
Publication of JPS61154139A publication Critical patent/JPS61154139A/ja
Publication of JPH027184B2 publication Critical patent/JPH027184B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP59274107A 1984-12-27 1984-12-27 ウェハキャリア運搬具 Granted JPS61154139A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59274107A JPS61154139A (ja) 1984-12-27 1984-12-27 ウェハキャリア運搬具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59274107A JPS61154139A (ja) 1984-12-27 1984-12-27 ウェハキャリア運搬具

Publications (2)

Publication Number Publication Date
JPS61154139A true JPS61154139A (ja) 1986-07-12
JPH027184B2 JPH027184B2 (enExample) 1990-02-15

Family

ID=17537099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59274107A Granted JPS61154139A (ja) 1984-12-27 1984-12-27 ウェハキャリア運搬具

Country Status (1)

Country Link
JP (1) JPS61154139A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240226A (ja) * 1986-04-08 1987-10-21 Mitsubishi Electric Corp カセツト移送装置
JPH02246135A (ja) * 1989-03-17 1990-10-01 Fujitsu Ltd キャリヤ搬送装置
CN103258775A (zh) * 2013-01-10 2013-08-21 苏州工业园区高登威科技有限公司 固定夹具
FR3058163A1 (fr) * 2016-10-31 2018-05-04 Commissariat A L'energie Atomique Et Aux Energies Alternatives Porte echantillon

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62240226A (ja) * 1986-04-08 1987-10-21 Mitsubishi Electric Corp カセツト移送装置
JPH02246135A (ja) * 1989-03-17 1990-10-01 Fujitsu Ltd キャリヤ搬送装置
CN103258775A (zh) * 2013-01-10 2013-08-21 苏州工业园区高登威科技有限公司 固定夹具
FR3058163A1 (fr) * 2016-10-31 2018-05-04 Commissariat A L'energie Atomique Et Aux Energies Alternatives Porte echantillon

Also Published As

Publication number Publication date
JPH027184B2 (enExample) 1990-02-15

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