JPS61153340U - - Google Patents
Info
- Publication number
- JPS61153340U JPS61153340U JP3681285U JP3681285U JPS61153340U JP S61153340 U JPS61153340 U JP S61153340U JP 3681285 U JP3681285 U JP 3681285U JP 3681285 U JP3681285 U JP 3681285U JP S61153340 U JPS61153340 U JP S61153340U
- Authority
- JP
- Japan
- Prior art keywords
- air
- type substrate
- substrate processing
- utility
- air knife
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985036812U JPH058675Y2 (enrdf_load_stackoverflow) | 1985-03-13 | 1985-03-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985036812U JPH058675Y2 (enrdf_load_stackoverflow) | 1985-03-13 | 1985-03-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61153340U true JPS61153340U (enrdf_load_stackoverflow) | 1986-09-22 |
JPH058675Y2 JPH058675Y2 (enrdf_load_stackoverflow) | 1993-03-04 |
Family
ID=30542345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985036812U Expired - Lifetime JPH058675Y2 (enrdf_load_stackoverflow) | 1985-03-13 | 1985-03-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH058675Y2 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01207181A (ja) * | 1988-02-16 | 1989-08-21 | Hitachi Ltd | 印刷回路板の洗浄方法 |
JPH0579941U (ja) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | 物品把持装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285461A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Continuous treating apparatus for plate form objects |
JPS57201028A (en) * | 1981-06-05 | 1982-12-09 | Toshiba Corp | Wafer conveying device |
JPS58134441A (ja) * | 1982-02-04 | 1983-08-10 | Fujitsu Ltd | ウエハ処理装置 |
JPS6014244A (ja) * | 1983-07-06 | 1985-01-24 | Fujitsu Ltd | マスク洗浄装置 |
-
1985
- 1985-03-13 JP JP1985036812U patent/JPH058675Y2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5285461A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Continuous treating apparatus for plate form objects |
JPS57201028A (en) * | 1981-06-05 | 1982-12-09 | Toshiba Corp | Wafer conveying device |
JPS58134441A (ja) * | 1982-02-04 | 1983-08-10 | Fujitsu Ltd | ウエハ処理装置 |
JPS6014244A (ja) * | 1983-07-06 | 1985-01-24 | Fujitsu Ltd | マスク洗浄装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01207181A (ja) * | 1988-02-16 | 1989-08-21 | Hitachi Ltd | 印刷回路板の洗浄方法 |
JPH0579941U (ja) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | 物品把持装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH058675Y2 (enrdf_load_stackoverflow) | 1993-03-04 |