JPS61151357U - - Google Patents
Info
- Publication number
- JPS61151357U JPS61151357U JP3504785U JP3504785U JPS61151357U JP S61151357 U JPS61151357 U JP S61151357U JP 3504785 U JP3504785 U JP 3504785U JP 3504785 U JP3504785 U JP 3504785U JP S61151357 U JPS61151357 U JP S61151357U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- laser device
- piping
- flow type
- discharge tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Lasers (AREA)
Description
第１図はガスフロー型レーザ装置の第１の例を
示す配管図、第２図は同第２の例を示す配線図、
第３図は従来のガスフロー型レーザ装置を示す配
管図である。
１……レーザ放電管、２……混合ガスボンベ、
３……配管、４……真空ポンプ、５……流量調整
バルブ、６……電磁弁、７……電磁三方弁、１１
……バイパス管路、１２……開閉弁、１３……リ
リーフ弁、１４……リレー、１５……ガス導入ス
イツチ。
Fig. 1 is a piping diagram showing a first example of a gas flow type laser device, Fig. 2 is a wiring diagram showing a second example of the same,
FIG. 3 is a piping diagram showing a conventional gas flow type laser device. 1... Laser discharge tube, 2... Mixed gas cylinder,
3... Piping, 4... Vacuum pump, 5... Flow rate adjustment valve, 6... Solenoid valve, 7... Solenoid three-way valve, 11
...Bypass pipe line, 12...Opening/closing valve, 13...Relief valve, 14...Relay, 15...Gas introduction switch.
Claims (1)
、ガス供給源から配管を介してレーザ放電管内に
混合ガスを供給し、これを真空ポンプを用いて大
気中に放出するようにしたガスフロー型レーザ装
置において、混合ガスをレーザ放電管に供給する
配管は、レーザ装置の停止時に混合ガスをレーザ
放電管内に送り込むためのガス導入手段を設けた
ことを特徴とするガスフロー型レーザ装置。 (2) ガス導入手段が開閉弁を有するバイパス管
路で形成されている実用新案登録請求の範囲第１
項に記載のガスフロー型レーザ装置。 (3) ガス導入手段が配管中に組込んだ電磁弁と
、この電磁弁のみを作動させるスイツチ回路とで
構成されている実用新案登録請求の範囲第１項に
記載のガスフロー型レーザ装置。[Scope of Claim for Utility Model Registration] (1) The laser discharge tube and the gas supply source are connected via piping, and a mixed gas is supplied from the gas supply source into the laser discharge tube via the piping, and this is pumped into the atmosphere using a vacuum pump. In the gas flow type laser device, the piping for supplying the mixed gas to the laser discharge tube is equipped with a gas introduction means for feeding the mixed gas into the laser discharge tube when the laser device is stopped. Gas flow type laser device. (2) Utility model registration claim No. 1 in which the gas introduction means is formed by a bypass pipe having an on-off valve
The gas flow type laser device described in . (3) The gas flow type laser device according to claim 1, wherein the gas introduction means is constituted by a solenoid valve built into the piping and a switch circuit that operates only this solenoid valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3504785U JPS61151357U (en) | 1985-03-12 | 1985-03-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3504785U JPS61151357U (en) | 1985-03-12 | 1985-03-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61151357U true JPS61151357U (en) | 1986-09-18 |
Family
ID=30538980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3504785U Pending JPS61151357U (en) | 1985-03-12 | 1985-03-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61151357U (en) |
-
1985
- 1985-03-12 JP JP3504785U patent/JPS61151357U/ja active Pending
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