JPS6349075U - - Google Patents
Info
- Publication number
- JPS6349075U JPS6349075U JP14268986U JP14268986U JPS6349075U JP S6349075 U JPS6349075 U JP S6349075U JP 14268986 U JP14268986 U JP 14268986U JP 14268986 U JP14268986 U JP 14268986U JP S6349075 U JPS6349075 U JP S6349075U
- Authority
- JP
- Japan
- Prior art keywords
- air
- valve
- operated valve
- pipe
- main pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Fluid-Driven Valves (AREA)
- Feedback Control In General (AREA)
Description
第１図は、本考案の一実施例である自動空気作
動弁制御回路を示す構成図、第２図は従来技術を
示す構成図である。
１……真空室、２……空気作動弁、３……空気
配管、４……電磁弁、５……流量調節弁、６……
バイパス配管、７……主配管、８……手動弁、９
……手動切替弁、１０……空気配管、１１……空
気配管。
FIG. 1 is a block diagram showing an automatic air-operated valve control circuit according to an embodiment of the present invention, and FIG. 2 is a block diagram showing a prior art. 1... Vacuum chamber, 2... Air operated valve, 3... Air piping, 4... Solenoid valve, 5... Flow control valve, 6...
Bypass piping, 7...Main piping, 8...Manual valve, 9
...Manual switching valve, 10...Air piping, 11...Air piping.
Claims (1)
配管の途中にあつて流路の開閉を行なう空気作動
弁と、該空気作動弁を作動させるエアー源と、該
エアー源と前記空気作動弁とを結ぶ空気配管の途
中に設けられ空気供給を自動切替えする電磁弁と
、前記空気作動弁の空気配管の途中に設けられエ
アー供給を手動で切替える手動切替弁とから成る
ことを特徴とする自動空気作動弁制御回路。 A main pipe that supplies processing gas into a processing chamber, an air-operated valve located midway through the main pipe that opens and closes a flow path, an air source that operates the air-operated valve, and the air source and the air-operated valve. An automatic valve comprising: a solenoid valve provided in the middle of an air pipe connecting the air valve to automatically switch the air supply; and a manual switching valve provided in the middle of the air pipe of the air-operated valve to manually switch the air supply. Air operated valve control circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14268986U JPS6349075U (en) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14268986U JPS6349075U (en) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6349075U true JPS6349075U (en) | 1988-04-02 |
Family
ID=31051654
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14268986U Pending JPS6349075U (en) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349075U (en) |
-
1986
- 1986-09-19 JP JP14268986U patent/JPS6349075U/ja active Pending