JPH01151244U - - Google Patents
Info
- Publication number
- JPH01151244U JPH01151244U JP4698588U JP4698588U JPH01151244U JP H01151244 U JPH01151244 U JP H01151244U JP 4698588 U JP4698588 U JP 4698588U JP 4698588 U JP4698588 U JP 4698588U JP H01151244 U JPH01151244 U JP H01151244U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- path
- chamber
- fluorescent
- branched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図および第２図は本考案の実施例を、第３
図および第４図は従来例をそれぞれ示し、第１図
は蛍光Ｘ線分析装置の構成図、第２図は真空度の
制御特性図、第３図は蛍光Ｘ線分析装置の構成図
、第４図は真空度の制御特性図である。
１……蛍光Ｘ線分析装置、４……真空室、６…
…真空ポンプ、８……真空排気路、１４……分岐
路、１８……空気供給路、２０……第１開閉バル
ブ、２２……第２開閉バルブ、２４……シーケン
スコントローラ。
Figures 1 and 2 show an embodiment of the present invention;
Figures 1 and 4 show conventional examples, respectively. Figure 1 is a configuration diagram of a fluorescent X-ray analyzer, Figure 2 is a vacuum degree control characteristic diagram, Figure 3 is a configuration diagram of a fluorescent X-ray analyzer, and Figure 4 is a diagram of the vacuum degree control characteristics. Figure 4 is a control characteristic diagram of the degree of vacuum. 1...Fluorescence X-ray analyzer, 4...Vacuum chamber, 6...
. . . Vacuum pump, 8 . . . Vacuum exhaust path, 14 .
Claims (1)
て連通するとともに、前記真空室内の真空度を検
出する真空計を備えた蛍光Ｘ線分析装置において
、 前記真空排気路を分岐してその分岐路の端部に
空気保持室を接続し、かつ、前記分岐路とは別に
前記空気保持室と真空室との間を空気供給路を介
して連通するとともに、前記空気供給路と分岐路
の途中にそれぞれ第１、第２開閉バルブを設ける
一方、前記真空計の出力信号に基づいて前記第１
、第２開閉バルブの動作を関連制御するシーケン
スコントローラを備えることを特徴とする蛍光Ｘ
線分析装置。[Claims for Utility Model Registration] In a fluorescent X-ray analyzer that communicates between a vacuum chamber and a vacuum pump via a vacuum exhaust path and is equipped with a vacuum gauge that detects the degree of vacuum in the vacuum chamber, The exhaust path is branched and an air holding chamber is connected to the end of the branched path, and apart from the branch path, the air holding chamber and the vacuum chamber are communicated via an air supply path, and the First and second on-off valves are provided in the middle of the air supply path and the branch path, respectively.
, a fluorescent X characterized by comprising a sequence controller that controls the operation of the second opening/closing valve.
Line analyzer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4698588U JPH0733152Y2 (en) | 1988-04-06 | 1988-04-06 | X-ray fluorescence analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4698588U JPH0733152Y2 (en) | 1988-04-06 | 1988-04-06 | X-ray fluorescence analyzer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01151244U true JPH01151244U (en) | 1989-10-19 |
| JPH0733152Y2 JPH0733152Y2 (en) | 1995-07-31 |
Family
ID=31273220
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4698588U Expired - Lifetime JPH0733152Y2 (en) | 1988-04-06 | 1988-04-06 | X-ray fluorescence analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733152Y2 (en) |
-
1988
- 1988-04-06 JP JP4698588U patent/JPH0733152Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733152Y2 (en) | 1995-07-31 |